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SUSS MicroTec

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179 entries

  1. ACS200 Gen3 IndustrialSUSS MicroTec

    The ACS200 Gen3 Industrial is a SUSS MicroTec coating and developing system. The ACS200 Gen3 Industrial is listed among SUSS coating solutions.

  2. MA 8 BA 6 WaferSUSS MicroTec

    The SUSS MicroTec MA 8 / BA 6 Wafer is a wafer aligner categorized under Lithography.

    CategoryLithography
  3. SB 6 ESUSS MicroTec

    The SUSS SB 6 E is a semi-automatic substrate bonder designed for aligned and unaligned wafer, substrate, and chip bonding using thermo-compression, anodic, fusion, adhesive, and related technologies.

    CategoryPackaging & Bonding
  4. MA 6 BA 6 IR MaskSUSS MicroTec
    CategoryLithography
  5. 80 T 3 SpinSUSS MicroTec

    The SUSS 80 T 3 is a spin coater.

  6. Falcon ACS 200 Coater Developer ClusterSUSS MicroTec

    The SUSS Falcon ACS 200 is a coater/developer cluster system for wafer processing.

  7. Gamma 200 SpraySUSS MicroTec
  8. MJB4SUSS MicroTec

    The SUSS MicroTec MJB4 is a manual mask/wafer aligner for research and development that aligns and exposes wafers up to 4 inch (100 mm) diameter.

    CategoryLithographyWafer100mmNodeabout 800 nm
  9. ACS200SUSS MicroTec

    The SUSS ACS200 GEN3 is a modular cluster tool for coating and development of i-line photoresists.

    CategoryLithographyWafer100mm
  10. MA 200 MaskSUSS MicroTec

    The SUSS MA 200 is a semi-automatic mask aligner capable of processing wafers up to 8 inches in diameter, using UV400 optics and a 365/405 nm sensor.

    CategoryLithography
  11. 150 e MaskSUSS MicroTec

    The SUSS 150 e is a mask aligner manufactured by SUSS MicroTec.

    CategoryLithography
  12. Delta BM 20SUSS MicroTec

    The SUSS Delta BM 20 is a coater.

  13. P 8SUSS MicroTec

    The SUSS P 8 is a manual probe station prober.

    CategoryTest & Probe
  14. ACS 300 Gen 2SUSS MicroTec

    The SUSS ACS 300 Gen 2 is a coater/developer system.

    CategoryThermal / DiffusionWafer300mm
  15. ACS300 Gen3SUSS MicroTec

    The ACS300 Gen3 is an automated coating and developing system for wafers up to 300 mm.

    Wafer300mm
  16. MJB55SUSS MicroTec

    The MJB55 is a mask aligner developed by SUSS MicroTec (then Karl Süss) for photolithography in mass production.

    CategoryLithography
    Mature
  17. ECD8SUSS MicroTec

    The SUSS MicroTec ECD8 is a coating and developing system listed within SUSS's Coating Solutions portfolio.

  18. MA12 Gen3SUSS MicroTec

    The MA12 Gen3 is a mask alignment system for photolithography listed under SUSS MicroTec's imaging solutions.

    CategoryLithography
  19. XBS300SUSS MicroTec

    The XBS300 is a SUSS MicroTec system for temporary bonding of wafers.

    CategoryPackaging & Bonding
  20. XBC300 Gen2 D2WSUSS MicroTec

    The SUSS XBC300 Gen2 D2W is a permanent bonding system offered by SUSS MicroTec.

    CategoryPackaging & Bonding
  21. XBS300 W2WSUSS MicroTec

    The SUSS XBS300 W2W is a wafer bonding system for permanent and temporary bonding applications.

    CategoryPackaging & Bonding
  22. SB8 Gen2SUSS MicroTec

    The SB8 Gen2 is part of SUSS MicroTec's high-precision bonding solutions, built on a scalable, modular platform for reliable permanent bonding outcomes.

    CategoryPackaging & Bonding
  23. LP50SUSS MicroTec

    The SUSS MicroTec LP50 is an inkjet printing solution for semiconductor manufacturing.

  24. NIL-SFT8 SeriesSUSS MicroTec

    The SUSS MicroTec NIL-SFT8 Series is a mask alignment system listed under the company's imaging solutions product portfolio.

  25. XBS200SUSS MicroTec

    The SUSS XBS200 is a permanent bonding system from SUSS MicroTec.

    CategoryPackaging & Bonding
  26. LabSpin6 / 8SUSS MicroTec

    The LabSpin6 / 8 is a manual coating and developing system for substrates up to 200 mm, capable of spin coating and puddle developing.

    Wafer200mm
  27. HP8 / CP8 / VP8SUSS MicroTec

    The HP8, CP8, and VP8 are manual coating and developing systems from SUSS MicroTec, supporting wafers up to 200 mm and offering baking, cooling, and vapor priming capabilities.

    Wafer200mm
  28. SD12SUSS MicroTec

    SUSS MicroTec SD12 is a manual coating and developing system for wafers up to 300 mm that supports solvent processes, puddle and spray developing, lift-off, and wafer cleaning.

  29. XBC300 Gen2 D2W/W2WSUSS MicroTec

    The SUSS XBC300 Gen2 D2W/W2W is a high-precision bonding system built on a scalable, modular platform for temporary, permanent, and hybrid bonding.

    CategoryPackaging & Bonding
  30. DSC300 Gen3SUSS MicroTec

    The DSC300 Gen3 is a UV scanning mask alignment system from SUSS MicroTec.

    CategoryLithography
  31. AS8 / 12SUSS MicroTec

    The SUSS MicroTec AS8 / 12 is a manual coating and developing system for wafers up to 300 mm, with spray coating as its primary process.

    Wafer300mm
  32. DSC300 Gen2SUSS MicroTec

    The SUSS MicroTec DSC300 Gen2 is an automated full-field scanning projection lithography system for wafers up to 300 mm.

    CategoryLithographyWafer300mm
  33. DSC500SUSS MicroTec

    The DSC500 is an automated, full-field scanning projection lithography system from SUSS MicroTec for substrates up to 450 x 500 mm.

    CategoryLithographyWafer450 x 500 mm
  34. ELP300 Gen2SUSS MicroTec

    The SUSS MicroTec ELP300 Gen2 is an automated excimer laser processing system for substrates up to 300 mm, used for ablation, laser-assisted debonding, and seed layer removal.

    Wafer300mm
  35. MJB 4 MaskSUSS MicroTec

    The SUSS MJB 4 Mask Aligner is a mask aligner used for contact exposure and alignment, with source-stated support for wafers up to 4 inches in diameter.

    CategoryLithography
  36. SB6 / 8 Gen2SUSS MicroTec

    The SUSS MicroTec SB6 / 8 Gen2 is a semi-automated wafer bonding system capable of handling wafers up to 200 mm.

    CategoryPackaging & BondingWafer200mm
  37. XB8SUSS MicroTec

    The SUSS MicroTec XB8 is a semi-automated wafer bonding system for substrates up to 200 mm, supporting high-force wafer bonding.

    CategoryPackaging & BondingWafer200mm
  38. ELD300SUSS MicroTec

    The ELD300 is a semi-automated excimer laser-assisted debonding system for wafers up to 300 mm.

    CategoryPackaging & BondingWafer300mm
  39. Delta 12 AQSUSS MicroTec

    The SUSS MicroTec Delta 12 AQ is an automated photoresist developer station that supports temperature controlled spray photoresist development.

    CategoryResist ProcessingWaferWafer Developing System Configuration
  40. PA 200SUSS MicroTec

    The SUSS PA 200 is a semi-automatic wafer prober for precision semiconductor wafer testing and electrical measurement.

    CategoryTest & Probe
  41. MA/BA6SUSS MicroTec

    The SUSS MicroTec MA/BA6 is a contact aligner for broadband lithography with backside alignment capability.

    CategoryLithography
  42. Delta 80 SpinSUSS MicroTec

    The SUSS Delta 80 Spin is a spin coater/developer with a 3 phase + N + PE, 400 V, 50 Hz power specification and no software included.

    CategoryResist Processing
  43. PA 200 HS BlueraySUSS MicroTec

    The SUSS MicroTec PA 200 HS Blueray is a test and probe tool. The PA 200 HS Blueray includes a control module, joystick, transformer, microscope, light source, XYZ prober Cascade Micro Positioner assemblies, probe arm and prober holder assemblies, and an isolation table.

    CategoryTest & Probe
  44. MJB 3 350 W MaskSUSS MicroTec

    The SUSS MJB 3 350 W is a mask aligner for 3-inch wafers.

    CategoryLithographyWaferWafer Equipment
  45. MA 4 MaskSUSS MicroTec

    The SUSS MA 4 Mask is a mask aligner used in lithography processes.

    CategoryLithography
  46. MCS8SUSS MicroTec

    The SUSS MicroTec MCS8 is a coating and developing system listed in the SUSS MicroTec products and solutions portfolio.

  47. AS 8 SpraySUSS MicroTec

    The SUSS AS 8 Spray Coater is a semi-automatic spray coater for substrates up to 200mm or 300mm in diameter and square substrates up to 6 inches edge length.

    CategoryWet Processing / Clean
  48. RC 5 SpinSUSS MicroTec

    The SUSS RC 5 is a spin coater.

    CategoryResist Processing
  49. FalconSUSS MicroTec

    The SUSS Falcon is a wafer backside rinse developer system configured for 6-inch to 8-inch wafers.

    CategoryResist ProcessingWaferWafer Backside Rinse
  50. ABC 200SUSS MicroTec
    CategoryPackaging & Bonding
  51. MA 14 MaskSUSS MicroTec

    The SUSS MA 14 Mask Aligner is a mask aligner used in lithography for semiconductor manufacturing, MEMS R&D, and micro-nano structure fabrication.

    CategoryLithography
  52. MA 8 BA 8 Gen 4 Pro MaskSUSS MicroTec
    CategoryLithography
  53. FC 150 Flip ChipSUSS MicroTec

    The SUSS FC 150 is a flip chip bonder used for bonding semiconductor chips to substrates.

    CategoryPackaging & Bonding
  54. MA 12SUSS MicroTec

    The SUSS MicroTec MA 12 is a semi-automated mask aligner for proximity exposure, supporting wafers up to 300 mm, with mask alignment and exposure capabilities.

    CategoryLithography
  55. MA / BA Gen4 Pro SeriesSUSS MicroTec

    The MA / BA Gen4 Pro Series is a semi-automated mask aligner and bond aligner system supporting wafers up to 150 mm / 200 mm, with capabilities for exposure, UV bonding, fusion bonding, micro- and nanoimprinting, and selective plasma activation.

    CategoryLithographyWafer150mm
  56. AD12SUSS MicroTec

    The SUSS MicroTec AD12 is a manual system for aqueous developing and wafer cleaning, handling wafers up to 300 mm.

    Wafer300mm
  57. MA100 / 150e Gen2SUSS MicroTec

    The MA100 / 150e Gen2 is an automated mask aligner for proximity exposure, supporting wafer sizes up to 150 mm.

    CategoryLithographyWafer150mm
  58. MA300 Gen2SUSS MicroTec

    The MA300 Gen2 is an automated mask aligner from SUSS MicroTec for proximity exposure of wafers up to 300 mm.

    CategoryLithographyWafer300mm
  59. DSM 200 WaferSUSS MicroTec
    CategoryMetrology & Inspection
  60. DSM 200 Overlay MeasurementSUSS MicroTec

    The SUSS MicroTec DSM 200 Overlay Measurement is a double-sided overlay measurement system used for metrology and inspection on semiconductor wafers.

    CategoryMetrology & Inspection