SUSS MicroTec

MA 12

Research Quality: 30% complete

The SUSS MicroTec MA 12 is a semi-automated mask aligner for proximity exposure, operating on wafers up to 300 mm. The MA 12 performs mask alignment and exposure functions. As a semi-automated system, the MA 12 offers mask alignment and exposure as its core process steps.^[1]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

The SUSS MicroTec MA 12 is a semi-automated system in the Mask Aligner (Proximity Exposure) product line, designed for wafer sizes up to 300 mm. Its primary functions are mask alignment and exposure. The MA 12 is categorized within the broader SUSS MicroTec portfolio of lithography systems, which includes proximity and projection lithography equipment.

What can it run?

Process applications and technology nodes documented for this tool.

Semiconductor lithography

What do the numbers mean?

Wafer handling1

Maximum wafer size: up to 300 mm^[1]

Optics & imaging2

Functions: Mask Alignment, Exposure^[1]
Product category: Mask Aligner (Proximity Exposure)^[1]

Configuration & options1

Automation: Semi-automated system^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the maximum wafer size supported?

The MA 12 handles wafers up to 300 mm.^[1]

Is the system automated or manual?

The MA 12 is a semi-automated system.^[1]

What processes does the MA 12 perform?

The MA 12 performs mask alignment and exposure.^[1]

Not publicly documented

The following facts about the MA 12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 12 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 12 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA 12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report