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SUSS MicroTec

DSC300 Gen3

LithographyGen3SUSS MicroTec DSC300 Gen3 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The DSC300 Gen3 is a UV scanning mask alignment system by SUSS MicroTec. The DSC300 Gen3 enables precise mask alignment and optimized throughput. The DSC300 Gen3 exposes complex structures reliably and at high yield.[1]

DSC300 Gen3 — suss.com
Fig. 01DSC300 Gen3suss.com[1]

What is it?

The DSC300 Gen3 is part of SUSS MicroTec's imaging solutions for UV scanning mask alignment, designed for accurate mask alignment and optimized throughput. The system enables exposing complex structures reliably and at high yield.

What do the numbers mean?

Optics & imaging1

Category
UV Scanning Mask Alignment[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Which company manufactures the DSC300 Gen3?

The DSC300 Gen3 is manufactured by SUSS MicroTec.[1]

Not publicly documented

The following facts about the DSC300 Gen3 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the DSC300 Gen3 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSC300 Gen3 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DSC300 Gen3 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DSC300 Gen3 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DSC300 Gen3 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]suss.com — suss.comsuss.com
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Last updated Sep 22, 2026.

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