Waferpedia

SUSS MicroTec

AS8 / 12

300mmSUSS MicroTec AS8 / 12 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The SUSS MicroTec AS8 / 12 is a manual coating and developing system for wafers up to 300 mm. The AS8 / 12 is specified for spray coating.[1]

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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

The AS8 / 12 is a manual system supporting wafer sizes up to 300 mm. Its stated process capability is spray coating.

What can it run?

Process applications and technology nodes documented for this tool.

  • Manual coating and developing of wafers up to 300 mm
  • Spray coating

What do the numbers mean?

Wafer handling1

Wafer Size
up to 300 mm[1]
Accurate?

Configuration & options2

Operation
Manual[1]
Accurate?
Process
Spray Coating[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the maximum substrate size for the AS8 / 12?

The AS8 / 12 is a manual system that processes substrates up to 300 mm.[1]

Is the AS8 / 12 an automated or a manual system?

The AS8 / 12 is a manual system.[1]

What process does the AS8 / 12 perform?

The AS8 / 12 performs spray coating.[1]

Not publicly documented

The following facts about the AS8 / 12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS8 / 12 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the AS8 / 12 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the AS8 / 12 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AS8 / 12 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the AS8 / 12 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]hilpert.ch — hilpert.chhilpert.ch
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Last updated Sep 22, 2026.

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