Waferpedia

SUSS MicroTec

Falcon

SUSS MicroTec logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Wafer Backside Rinse

Power

380 V, 50/60 Hz, 3 Phase[1]

Gas delivery

2[1]

What is it?

The SUSS Falcon is a wafer backside rinse developer system configured for 6-inch to 8-inch wafers.

What do the numbers mean?

Power & electrical1

Power Requirements
380 V, 50/60 Hz, 3 Phase[1]
Accurate?

Wafer handling2

Cassette Elevators
2[1]
Accurate?
Wafer size
Wafer Backside Rinse[1]
Accurate?

Gas & chemistry1

Developer Dispensers
2[1]
Accurate?

Control & software1

Controller Type
Microprocessor Controller[1]
Accurate?

Configuration & options4

Polyimid[1]
Accurate?
2 chambers[1]
Accurate?
Number of Hot Plates
0[1]
Accurate?
Number of Chill Plates
0[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Developer Dispensers2[1]
  • Power Requirements380 V, 50/60 Hz, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Falcon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Falcon are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Falcon are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Falcon are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Falcon are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Falcon is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Sep 24, 2026.

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