SUSS MicroTec
ACS 200 +
The SUSS ACS 200 + is a coater and developer system for 6-inch wafers. The SUSS ACS 200 + includes a Gencobot 7S / 3L transfer robot, multiple modules, and support equipment.[1]
Plate 01ACS200 Gen3 TE Coater & Developer - Fully Automated Platform for Maximum Throughput
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What it is
How it works
General reference — not yet source-verifiedA coater and developer system applies liquid process materials to wafers and then removes selected regions during development to form patterned resist films.
A tool of this class normally combines coating, developing, thermal conditioning, and transfer handling in one processing platform.
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical4
Wafer handling3
- With Gencobot 7S / 3L Transfer Robot[1]
Gas & chemistry6
Control & software5
Configuration & options17
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ACS 200 + | — | 2007 | — | Equipment inventory listing[1] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Heidelberg Instruments MLA150— Same function class: Lithography, nullCompare in depthsource[6]
- Tokyo Electron Lithius Pro— Same function class: Lithography, nullCompare in depthsource[6]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage400 V[1]
- Phase3 Phase[1]
- Frequency60 Hz[1]
- ConfigurationnDeveloper Module[1]
- ConfigurationSolvent Developer Module[1]
- Developer ModulenDeveloper Module[1]
- Solvent Developer ModuleYes[1]
- Power Requirements400 V, 3 Phase, 60 Hz[1]
- Equipment typeCoater / Developer[1]
- Developer module typeSolvent developer module[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What modules are included on the ACS 200 +?
The ACS 200 + includes a Gencobot 7S / 3L transfer robot, an nDeveloper module, a solvent developer module, a coater module, and a thermal module with two hotplates and one chillplate.[1]
What control and utility components are included on the ACS 200 +?
The ACS 200 + includes a Kontron controller, SUSS media storage tanks, a SUSS media control box, a Julabo F30-CL recirculating chiller, two Julabo FC 600 S recirculating chillers, an LCD monitor, and a power cabinet.[1]
Not publicly documented
The following facts about the ACS 200 + are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ACS 200 + are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the ACS 200 + are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ACS 200 + are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ACS 200 + is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ACS 200 + are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]XB8 Permanent Bonder | SUSS — suss.com (Nov 13, 2024)web.archive.org
Last updated Oct 10, 2026.
Compare with similar tools
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Tokyo Electron Lithius Pro is a coater/developer described as an immersion COT and DEV system with rinse processing at pre-/post-exposure.
The Heidelberg Instruments MLA150 is a mask-less direct-write lithography system for exposing photoresist on substrates without a photomask.