Perkin Elmer
11 067 Ion Gun Control
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Perkin Elmer 11 067 Ion Gun Control is a sputter ion gun control unit from the Physical Electronics Division of Perkin-Elmer. The Perkin Elmer 11 067 Ion Gun Control provides a beam voltage adjustable from zero to +5000 volts DC. The Perkin Elmer 11 067 Ion Gun Control has a pressure range of 0-50 mP.[1]
How it works
The 11 067 control uses a feedback loop where the emission current from the filament is measured and used to regulate the filament current supply, keeping the emission constant. The two-axis deflection system generates push-pull triangular output voltage waveforms for both X and Y axes, with amplitudes adjustable between 0 and +200 volts AC peak-to-peak and a DC level of 110 volts. A special electrically isolated aperture plate in the ion gun collects a fraction of the electrons produced in the ionization region; this current is a function of pressure and is read as a pressure signal on the panel meter.[1]
The control includes a three-position toggle switch for beam voltage (ON, OFF, or REMOTE via TTL signal). A five-turn digital readout control sets the beam voltage, and another five-turn control sets the focus voltage ratio. Raster amplitude is controlled by single-turn potentiometers for each axis, with a master toggle to enable or disable the deflection system. The emission current or pressure can be selected for display on the panel meter via a two-position switch.[1]
What do the numbers mean?
Power & electrical5
Vacuum & pumping1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What is the beam voltage range of the 11 067 ion gun control?
The beam voltage power supply can be adjusted to any value between zero and +5000 volts DC.[1]
How is the focus voltage adjusted?
The focus voltage is set as a ratio of the beam voltage, variable between 70 and 100 percent, with a minimum of 100 volts DC.[1]
What is the raster amplitude range for the deflection system?
The raster amplitude for each axis is adjustable between 0 and +200 volts peak-to-peak.[1]
What pressure range does the pressure measurement circuit cover?
The pressure range is 0 to 50 mP (millipascal).[1]
What is the stability specification of the 11 067 control?
The stability is 1% per hour, with ripple of 0.2 V peak-to-peak.[1]
What is the output current capability of the control?
The output current is 50 mA.[1]
Not publicly documented
The following facts about the 11 067 Ion Gun Control are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 11 067 Ion Gun Control are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 11 067 Ion Gun Control are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 11 067 Ion Gun Control are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 11 067 Ion Gun Control are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 11 067 Ion Gun Control is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]engineering.purdue.edu — engineering.purdue.eduengineering.purdue.edu
- [2]Inventory photo
Last updated Sep 24, 2026.
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