Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Perkin Elmer 11 067 Ion Gun Control, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11 067 Ion Gun ControlPerkin Elmer | |
|---|---|---|
| OEM | ABM | Perkin Elmer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Perkin Elmer 11 067 Ion Gun Control |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Beam voltage range | — | 0 to +5000 volts DC[2] |
| Focus ratio | — | 70-100% of beam voltage[2] |
| Minimum focus voltage | — | 100 volts DC[2] |
| Raster amplitude | — | 0 to +200 volts peak-to-peak[2] |
| Pressure range | — | 0-50 mP[2] |
| Anode current | — | 25 uA at 50 mP[2] |
| Output current | — | 50 mA[2] |
| Stability | — | 1% per hour[2] |
| Ripple | — | 0.2 V peak-to-peak[2] |