Waferpedia

Comparison ledger

0010-03254 E Chuckversus11 067 Ion Gun Control

Applied Materials 0010-03254 E Chuck, Perkin Elmer 11 067 Ion Gun Control, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPerkin Elmer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Perkin Elmer 11 067 Ion Gun Control
Specifications
Beam voltage range—0 to +5000 volts DC[1]
Focus ratio—70-100% of beam voltage[1]
Minimum focus voltage—100 volts DC[1]
Raster amplitude—0 to +200 volts peak-to-peak[1]
Pressure range—0-50 mP[1]
Anode current—25 uA at 50 mP[1]
Output current—50 mA[1]
Stability—1% per hour[1]
Ripple—0.2 V peak-to-peak[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]engineering.purdue.eduengineering.purdue.edu