Waferpedia

Laurell

H6-8 B

Resist Processing200mmLaurell H6-8 B family
Research Quality: 40% complete

The Laurell H6-8 B is a spin coater. The Laurell H6-8 B is in the 650-series. The Laurell H6-8 B has a maximum substrate size of 200mm (7" x 7").[1]

LaurellH6-8 B
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What it is

The Laurell H6-8 B is a spin coater for resist processing.[1]

The H6-8 B belongs to Laurell’s 650-series spin coater family. The H6-8 B has a maximum substrate size of 200 mm and a maximum speed of 12000 rpm. The H6-8 B supports tabletop, in-deck, and on-deck mounting.[1]

How it works

General reference — not yet source-verified

A spin coater deposits a liquid film on a substrate and uses rapid rotation to spread the film by centrifugal action. The rotating substrate leaves a more uniform coating after excess liquid is driven outward.

Resist processing equipment of this class is used with wafer-scale substrates and similar flat workpieces. The machine holds the substrate on a chuck, applies the coating material, and spins the substrate through a programmed sequence.

Where it fits in the process flow

General reference — not yet source-verified

The H6-8 B fits into front-end or laboratory coating steps before exposure and pattern transfer. The machine prepares a resist layer that can follow downstream alignment, exposure, and development operations.

A spin coater sits between substrate cleaning or preparation and later lithography steps. The coated substrate then proceeds to processes that define the final patterned film.

Applications

General reference — not yet source-verified

The H6-8 B is used for resist coating on flat substrates. The class is commonly used for photoresist and other liquid thin-film coatings on wafers and similar workpieces.

The H6-8 B supports coating workflows that require controlled film spreading and repeatable coverage. The equipment class is used in microfabrication and other processes that rely on uniform resist layers.

What do the numbers mean?

Wafer handling1

Max. Substrate Size
200mm (7" x 7")[1]
Accurate?

Control & software1

Controller
650-series[1]
Accurate?

Configuration & options3

Type
Spin Coater[1]
Accurate?
Max. RPM
12000 rpm[1]
Accurate?
Mounting Options
Tabletop, In-Deck, On-deck[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the maximum substrate size of the H6-8 B?

The maximum substrate size of the H6-8 B is 200 mm.[1]

What mounting options are available for the H6-8 B?

The H6-8 B supports tabletop, in-deck, and on-deck mounting.[1]

Which family does the H6-8 B belong to?

The H6-8 B belongs to Laurell’s 650-series spin coater family.[1]

Not publicly documented

The following facts about the H6-8 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the H6-8 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the H6-8 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the H6-8 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the H6-8 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the H6-8 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]images.laurell.com — images.laurell.comimages.laurell.com
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Last updated Oct 7, 2026.

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