Waferpedia

Laurell

EDC-650-8B

The Laurell EDC-650-8B is an EDC System spin coater. The Laurell EDC-650-8B is in the 650 Series. The Laurell EDC-650-8B has a maximum substrate size of 200mm (7" x 7") and a maximum RPM of 12,000 rpm.[1]

EDC-650-8B — laurell.com
Fig. 01EDC-650-8Blaurell.com[1]

What it is

The Laurell EDC-650-8B is a spin coater in the EDC System 650 Series.[1]

How it works

General reference — not yet source-verified

A spin coater applies a liquid film to a flat substrate and uses rapid rotation to spread the liquid into a thin, uniform layer.

A spin coater is used with a substrate held on a rotating stage, and the deposited material is distributed by centrifugal force while excess liquid is removed from the surface.

Where it fits in the process flow

General reference — not yet source-verified

A spin coater is a front-end wet-process tool used before later lithography and pattern-transfer steps.

A spin coater commonly sits in a resist-coating sequence before soft bake and exposure.

Applications

General reference — not yet source-verified

A spin coater is used for photoresist and other thin-film coating processes on semiconductor and related substrates.

A spin coater is also used for laboratory and pilot-line coating of functional liquids that must form a controlled thin layer.

What do the numbers mean?

Wafer handling1

Max substrate size
200mm (7" x 7")[1]
Accurate?

Configuration & options5

Model
EDC-650-8B[1]
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Type
EDC System[1]
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Series
650 Series[1]
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Max RPM
12,000 rpm[1]
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Mounting options
Tabletop, In-Deck, On-Deck[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the EDC-650-8B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-8B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the EDC-650-8B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the EDC-650-8B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EDC-650-8B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EDC-650-8B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]laurell.com — laurell.comlaurell.com
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Last updated Oct 7, 2026.

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