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KLA

Surfscan 6400 Particle Defect

Metrology & InspectionKLA Surfscan 6400 family
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The KLA Surfscan 6400 Particle Defect is an unpatterned wafer surface particle inspection system. The KLA Surfscan 6400 Particle Defect is specified for 6-inch wafers. The KLA Surfscan 6400 Particle Defect uses a 30 mW argon-ion laser at 488 nm wavelength.[1][2]

Surfscan 6400 Particle Defect — Inventory photo
Fig. 01Surfscan 6400 Particle DefectInventory photo[2]

  • Plate 01KLA-Tencor Surfscan 6400 Defect Inspection System (ID# 3980)

    ClassOneEngineeringWatch on YouTube

Power

208V, 17A, 60Hz[2]

Performance

Count repeatability error, less than 1.5%[2]

Optics

30mW Argon=Ion laser, 488nm wavelength[2]

What it is

The KLA Surfscan 6400 Particle Defect is a metrology and inspection system for bare wafer surface defect inspection.[1]

The Surfscan 6400 is an unpatterned wafer surface particle inspection system used to detect particles and other surface defects on wafer surfaces before patterning steps.[5]

How it works

The Surfscan 6400 uses a 30 mW argon-ion laser at a 488 nm wavelength.[2][1][4]

The Surfscan 6400 supports single puck handling from a cassette or platform and automatic substrate thickness adjustment within a 2 mm range.[5][4]

Where it fits in the process flow

The Surfscan 6400 sits in metrology and inspection for unpatterned wafers and supports inline contamination and defect screening on wafer surfaces.[5][1]

Applications

The Surfscan 6400 is specified for bare silicon and other surfaces that scatter less than most of the incident light.[4]

The Surfscan 6400 is specified for defect sensitivity better than 0.20 micrometers on most surfaces and better than 0.15 micrometers on polished silicon at a 95 percent capture rate.[2][1][4]

The Surfscan 6400 is specified for throughput up to 120 wafers per hour using 150 millimeter wafers and up to 95 wafers per hour using 200 millimeter wafers.[2][1][5][4]

What do the numbers mean?

Power & electrical2

Voltage
208V, 17A, 60Hz[2]
Accurate?
Power
208V, 17A, 60Hz[1]
Accurate?

Wafer handling5

Up to 120 wafers per hour(150mm), 95 wafers[2]
Accurate?
Single puck handling from cassette or platform[2]
Accurate?
Wafer size
6 inch[2]
Accurate?
Throughput
Up to 120 wafers per hour (150mm), 95 wafers per hour (200mm)[2]
Accurate?
Handling
Single puck handling from cassette or platform[2]
Accurate?

Optics & imaging3

30mW Argon=Ion laser, 488nm wavelength[2]
Accurate?
Illumination source
30mW Argon-Ion laser, 488nm wavelength[2]
Accurate?
Relative standard spatial resolution
50 um spacing, minimum[4]
Accurate?

Performance2

Count repeatability error, less than 1.5%[2]
Accurate?
Count repeatability error
Less than 1.5%[2]
Accurate?

Configuration & options16

Phase
1 Phase[1]
Accurate?
Greater than 0.20um[2]
Accurate?
Greater than 0.10um @ 95% capture rate[2]
Accurate?
Count greater than 500, 0.364um diameter latex spheres on bare silicon[2]
Accurate?
0.1um to 100um in a single measurement[2]
Accurate?
(200mm)[2]
Accurate?
Less than 0.005 particles/cm2 greater than 0.15um  diameter per single pass in a class 10 cleanroom[2]
Accurate?
Manufacturer
KLA[2]
Accurate?
Model
Surfscan 6400 Particle Defect[2]
Accurate?
Category
Metrology & Inspection[1]
Accurate?
Defect sensitivity
Greater than 0.20um[2]
Accurate?
Defect sensitivity at 95% capture rate
Greater than 0.10um[2]
Accurate?
Count reference
Greater than 500, 0.364um diameter latex spheres on bare silicon[2]
Accurate?
Dynamic range
0.1um to 100um in a single measurement[2]
Accurate?
Contamination
Less than 0.005 particles/cm2 greater than 0.15um diameter per single pass in a class 10 cleanroom[2]
Accurate?
Material
Any surface that scatters less than 90% of incident light[4]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208V, 17A, 60Hz[2]
  • Power208V, 17A, 60Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes can the Surfscan 6400 handle?

The Surfscan 6400 can handle up to 200 mm wafers.[5][1][4]

What type of inspection does the Surfscan 6400 perform?

The Surfscan 6400 performs bare wafer surface defect inspection on unpatterned wafers.[5][1]

What illumination source does the Surfscan 6400 use?

The Surfscan 6400 uses a 30 mW argon-ion laser at 488 nm wavelength.[2][1][4]

What is the throughput of the Surfscan 6400?

The Surfscan 6400 is specified at up to 120 wafers per hour using 150 mm wafers and up to 95 wafers per hour using 200 mm wafers.[2][1][5][4]

Not publicly documented

The following facts about the Surfscan 6400 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6400 Particle Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6400 Particle Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan 6400 Particle Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan 6400 Particle Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan 6400 Particle Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]classoneequipment.com — classoneequipment.comclassoneequipment.com
  5. [5]Surfscan 6400 — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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