Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan 6400 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | KLA Surfscan 6400 |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Greater than 0.20um[3] |
| Phase | — | 1 Phase[2] |
| Voltage | — | 208V, 17A, 60Hz[3] |
| Manufacturer | — | KLA[3] |
| Model | — | Surfscan 6400 Particle Defect[3] |
| Category | — | Metrology & Inspection[2] |
| Wafer size | — | 6 inch[3] |
| Power | — | 208V, 17A, 60Hz[2] |
| Defect sensitivity | — | Greater than 0.20um[3] |
| Defect sensitivity at 95% capture rate | — | Greater than 0.10um[3] |
| Count repeatability error | — | Less than 1.5%[3] |
| Count reference | — | Greater than 500, 0.364um diameter latex spheres on bare silicon[3] |
| Dynamic range | — | 0.1um to 100um in a single measurement[3] |
| Throughput | — | Up to 120 wafers per hour (150mm), 95 wafers per hour (200mm)[3] |
| Contamination | — | Less than 0.005 particles/cm2 greater than 0.15um diameter per single pass in a class 10 cleanroom[3] |
| Handling | — | Single puck handling from cassette or platform[3] |
| Illumination source | — | 30mW Argon-Ion laser, 488nm wavelength[3] |
| Material | — | Any surface that scatters less than 90% of incident light[4] |
| Relative standard spatial resolution | — | 50 um spacing, minimum[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →