Edwards

RV12

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The Edwards RV12 is a vacuum pump model named in the PDS 2010 parylene deposition system manual. The Edwards RV12 is specified as the 50 Hz vacuum pump used with the PDS 2010.^[1]

EdwardsRV12

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Plate 01Edwards RV12 A655-01-906 2-Stage Rotary Vane Vacuum Pump, Oil Mist Filter EMF10, Serial #: 016933438
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Plate 03EDWARDS RV12 Vacuum pump
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Plate 06Edwards 12 RV12 Rotary Vane Vacuum Pump with Oil Mist Filter & VisiTrap 120V
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Power

EDWARDS RV12 (50 HZ)^[1]

Vacuum

vacuum pump^[1]

Gas delivery

Mode selector and gas-ballast control^[2]

What it is

The Edwards RV12 is a rotary vane vacuum pump. The RV12 is part of the RV series of dual-stage mechanical vacuum pumps.^[2]^[3]

The RV12 is intended to be incorporated into other equipment and not to function independently. The RV12 series pump uses a dual-mode concept that can be configured for high gas loads or for high vacuum operation.^[2]^[3]

How it works

The RV12 includes a mode selector and a two-position gas ballast. The gas ballast is used to handle condensable vapours and to support operation with water vapour and other condensable gases.^[2]^[3]

What can it run?

Process applications and technology nodes documented for this tool.

Vacuum pumping for the PDS 2010 parylene deposition system

What do the numbers mean?

Power & electrical3

Model designation in manual: EDWARDS RV12 (50 HZ)^[1]
Electrical supply: 1-phase 110-120 V or 220-240 V, 50 or 60 Hz; 3-phase 200-230 V or 380-460 V, 50 or 60 Hz^[3]
Motor power: 450 W at 50 Hz; 550 W at 60 Hz^[3]

Vacuum & pumping3

Type: vacuum pump^[1]
Pump type: Two-stage, oil-sealed, sliding-vane vacuum pump^[2]
Ultimate vacuum: 2 x 10^-3 mbar / 1.5 x 10^-3 Torr in high vacuum mode with gas ballast closed^[3]

Gas & chemistry2

Controls: Mode selector and gas-ballast control^[2]
Gas-ballast positions: Closed (0), low flow (I), high flow (II)^[2]

Dimensions & facilities1

Weight without oil: 26 kg / 58 lb^[3]

Configuration & options5

Inlet port: NW25^[2]
Outlet port: NW25^[2]
Operating temperature range: 12 to 40 °C^[2]
Oil capacity: Minimum 0.65 liter; maximum 1.0 liter^[3]
Recommended oil: Ultragrade 19^[3]

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What replaced it?

siblingEdwards RV 8— The manual names EDWARDS RV 8 (60 HZ) as the alternate vacuum pump used with the same system.source^[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Typevacuum pump^[1]
Model designation in manualEDWARDS RV12 (50 HZ)^[1]
Pump typeTwo-stage, oil-sealed, sliding-vane vacuum pump^[2]
ControlsMode selector and gas-ballast control^[2]
Gas-ballast positionsClosed (0), low flow (I), high flow (II)^[2]
Electrical supply1-phase 110-120 V or 220-240 V, 50 or 60 Hz; 3-phase 200-230 V or 380-460 V, 50 or 60 Hz^[3]
Motor power450 W at 50 Hz; 550 W at 60 Hz^[3]
Ultimate vacuum2 x 10^-3 mbar / 1.5 x 10^-3 Torr in high vacuum mode with gas ballast closed^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the RV12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RV12 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RV12 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RV12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RV12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RV12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report