Comparison ledger
ABM -407B-1-S-CES293 Robot, Edwards RV12, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RV12Edwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | Legacy |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Edwards RV12 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | RV12[3] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Type | — | vacuum pump[2] |
| Model designation in manual | — | EDWARDS RV12 (50 HZ)[2] |
| Pump type | — | Two-stage, oil-sealed, sliding-vane vacuum pump[3] |
| Inlet port | — | NW25[3] |
| Outlet port | — | NW25[3] |
| Controls | — | Mode selector and gas-ballast control[3] |
| Gas-ballast positions | — | Closed (0), low flow (I), high flow (II)[3] |
| Operating temperature range | — | 12 to 40 °C[3] |
| Weight without oil | — | 26 kg / 58 lb[4] |
| Electrical supply | — | 1-phase 110-120 V or 220-240 V, 50 or 60 Hz; 3-phase 200-230 V or 380-460 V, 50 or 60 Hz[4] |
| Motor power | — | 450 W at 50 Hz; 550 W at 60 Hz[4] |
| Oil capacity | — | Minimum 0.65 liter; maximum 1.0 liter[4] |
| Recommended oil | — | Ultragrade 19[4] |
| Ultimate vacuum | — | 2 x 10^-3 mbar / 1.5 x 10^-3 Torr in high vacuum mode with gas ballast closed[4] |
| OEM | — | Edwards[3] |
| Pump construction | — | Two-stage, oil-sealed, sliding-vane vacuum pump[3] |
| Inlet connection | — | NW25[3] |
| Outlet connection | — | NW25[3] |
| Maximum displacement, 50 Hz | — | 14.2 m3h-1[3] |
| Maximum displacement, 60 Hz | — | 17.0 m3h-1[3] |
| Maximum pumping speed, 50 Hz | — | 12.0 m3h-1[3] |
| Maximum pumping speed, 60 Hz | — | 14.2 m3h-1[3] |
| Noise | — | 48 dB(A) @ 50 Hz[3] |
| Oil capacity maximum | — | 1.0 liter[3] |
| Oil capacity minimum | — | 0.65 liter[3] |