Waferpedia

Tool family

Edwards RV12

Edwards1 entry

The Edwards RV12 is a vacuum pump model named in the PDS 2010 parylene deposition system manual. The PDS 2010 manual identifies the Edwards RV12 as the 50 Hz vacuum pump used with the system.

Models in this family

  1. RV12Legacy

    The Edwards RV12 is a vacuum pump model named in the PDS 2010 parylene deposition system manual. The PDS 2010 manual identifies the Edwards RV12 as the 50 Hz vacuum pump used with the system.