Applied Materials
VIISta 80 High Current
Wafer size
Laser Wafer Mapping
Power
3 Phase, 208 V[1]
Vacuum
UES with Turbo Foreline[1]
Gas delivery
Gas Box:[1]
What it is
What do the numbers mean?
Power & electrical2
Vacuum & pumping4
Wafer handling7
Gas & chemistry5
- Gas Box:[1]
Configuration & options15
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Line Voltage3 Phase, 208 V[1]
- Line Frequency50 / 60 Hz[1]
- ConfigurationGas Box:[1]
- He MFC SizeOptional[1]
- N 2 MFC Size1 slm (for 500 sccm in the recipe)[1]
- TypeUES with Turbo Foreline[1]
- ConfigurationPump Options:[1]
- Gas Box5 sticks, HP and SDS 2 in use; He MFC optional; N2 MFC 1 slm[1]
- Loadlock / Cassette2 chambers, UES with Turbo Foreline; Cassette Stage 200 mm (8") Standard with Laser Wafer Mapping[1]
- Gas BoxDPN (Aluminum), 5 sticks, HP and SDS 2 in use[1]
- Loadlock Chambers2, Type UES with Turbo Foreline[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of gas box does the VIISta 80 use?
The VIISta 80 uses a DPN (Aluminum) gas box with 5 sticks, with HP and SDS 2 in use, and a nitrogen MFC size of 1 slm.[1]
What are the loadlock specifications of the VIISta 80?
The VIISta 80 has two loadlock chambers of type UES with Turbo Foreline, a 200 mm cassette stage, and laser wafer mapping.[1]
What are the line voltage and frequency requirements for the VIISta 80?
The VIISta 80 requires 208 V three-phase power with a line frequency of 50/60 Hz.[1]
What chiller is used with the VIISta 80?
The VIISta 80 uses an Affinity RAA 012 K CE 55 CBC chiller.[1]
Not publicly documented
The following facts about the VIISta 80 High Current are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VIISta 80 High Current are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the VIISta 80 High Current are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VIISta 80 High Current are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VIISta 80 High Current are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VIISta 80 High Current is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Oct 1, 2026.
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