Applied Materials
P 5000 MxP+
What it is
How it works
Where it fits in the process flow
Applications
What do the numbers mean?
Power & electrical15
- RF Match[1]
Vacuum & pumping3
- Edwards Turbo / Controller[1]
Wafer handling6
- Cassette to Cassette[2]
Configuration & options16
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Oxford Instruments Plasmalab 100 ICP 380— Same function class: Etch, nullCompare in depthsource[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage208 V, 125.0 A, 50/60 Hz, 3 Phase[1]
- Largest Load Ampere Rating125 Amps[1]
- Full Load Current250 Amps[1]
- Interrupt Current10,000 Amps I.C.[1]
- RF GeneratorOEM 12 B[1]
- ConfigurationRF Match[1]
- Baraton1 Torr[1]
- ConfigurationEdwards Turbo / Controller[1]
- Baratron1 Torr[1]
- Voltage208 V, 50/60 Hz, 3 Phase[2]
- Full Load Current120 Amps[2]
- Largest Load Ampere Rating32 Amps[2]
- Chamber A RF generatorOEM 12 B[1]
- Chamber B RF generatorOEM 12 B[1]
- Chamber C RF generator12 B[1]
- Electrical requirementLine voltage 200/208 V[1]
- Electrical requirementLine frequency 50/60 Hz[1]
- Electrical requirementLine amperage 123 Amps[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the P 5000 MxP+ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 5000 MxP+ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the P 5000 MxP+ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the P 5000 MxP+ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the P 5000 MxP+ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the P 5000 MxP+ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Equipment inventory listing
- [6]Applied Materials P 5000 MxP+ family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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