Comparison ledger
Applied Materials P 5000 MxP+, Oxford Instruments Plasmalab 100 ICP 380, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 5000 MxP+Applied Materials | Plasmalab 100 ICP 380Oxford Instruments |
|---|---|---|
| OEM | Applied Materials | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials P 5000 MxP+ | Oxford Instruments Plasmalab 100 |
| Specifications | ||
| Voltage | 208 V, 125.0 A, 50/60 Hz, 3 Phase[2] | 415 Vac 3~[1] |
| Largest Load Ampere Rating | 125 Amps[2] | — |
| MAximum Ampere Rating | 90 KVA[2] | — |
| Full Load Current | 250 Amps[2] | — |
| Interrupt Current | 10,000 Amps I.C.[2] | — |
| Wafer Set Size | 8"[2] | — |
| Chamber A | MxP+ Etch[2] | — |
| Chamber B | MxP+ Etch[2] | — |
| Chamber C | MxP+ Etch[2] | — |
| Configuration | Chamber A:[2] | — |
| RF Generator | OEM 12 B[2] | — |
| Baraton | 1 Torr[2] | — |
| Slit Valve | Standard[2] | — |
| Baratron | 1 Torr[2] | — |
| Make | Applied Materials[2] | — |
| Model | P 5000 MxP+[2] | — |
| Category | Etcher[2] | — |
| Wafer sizes | 8, 6 inch[2] | — |
| Wafer set size | 6"[3] | — |
| Chamber A RF generator | OEM 12 B[2] | — |
| Chamber B RF generator | OEM 12 B[2] | — |
| Chamber C RF generator | 12 B[2] | — |
| Electrical requirement | Line voltage 200/208 V[2] | — |
| Mainframe type | Standard[2] | — |
| Robot type | MK II[2] | — |
| Load lock cassette | Manual 2 Cassette[2] | — |
| Storage elevator | 15 slots[2] | — |
| Power rack | Shrink[2] | — |
| Line Frequency | 50/60 Hz[2] | — |
| Line Voltage | 200/208 V[2] | — |
| Line Amperage | 123 Amps[2] | — |
| 3rd Monitor | Penulator[2] | — |
| OEM | Applied Materials[3] | — |
| Frequency | — | 50 Hz[1] |
| Max rated input current | — | 42 amps[1] |
| Interrupt current | — | 6KA[1] |
| Supply voltage | — | 415 Vac 3~[1] |
| Vintage | — | 2011[1] |
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