Waferpedia

Tool family

SUSS MicroTec SB 6

Models in this family

  1. The SUSS SB 6 is a 6-inch wafer bonder with thermal compression and anodic bonding capabilities.

    Cited variants

    DesignationGenerationVintageChangesSource
    SB6 GEN2GEN2—Second generation with 550°C heating optionuwaterloo.ca[1]
    SB6/8e——Semi-automatic wafer bonding system for 150 mm and 200 mm wafersweb.archive.org[2]

All entries

  1. SB 6SUSS MicroTec

    The SUSS SB 6 is a 6-inch wafer bonder with thermal compression and anodic bonding capabilities.

    CategoryPackaging & BondingWaferWafer bonding at pressures 5e-5 to 3e-3 Torr and 50*C to 550*C
    25 specs
  2. SB 6 VACSUSS MicroTec
    CategoryPackaging & Bonding
    3 specs

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]uwaterloo.cauwaterloo.ca
  2. [2]web.archive.orgweb.archive.org