SUSS MicroTec MA 200

Models in this family

1. 

   MA 200

   The SUSS MA 200 is a lithography aligner with source-listed wafer sizes of 6 inch and 8 inch.

2. 

   MA 200 Automatic Mask

   The SUSS MA 200 Automatic Mask Aligner is a lithography tool configured for top-side alignment and described as capable of working with wafer masks up to 9″ x 9″.

3. 

   MA 200 CC

   The SUSS MA 200 CC is an aligner.

4. 

   MA 200 CC Exposure
5. 

   MA 200 CC Mask

   The SUSS MA 200 CC is a mask aligner.

6. 

   MA 200 Compact Mask

   The SUSS MA 200 Compact Mask Aligner is a 6-inch wafer-handling mask aligner with robot handler type, two loaders, pre-aligner, GEM/SECS, CDA, vacuum, gas, and 400V power listed.

7. 

   MA 200 Gen 3 Mask

   The SUSS MA 200 Gen 3 is a mask aligner for lithography applications, with source-stated wafer sizes of 6 inch and 8 inch and an OEM-stated maximum wafer size of up to 8"/200 mm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MA 200 Gen 3 (6")	Gen 3	—	6-inch wafer size; electrical supply 3 Phase + N + PE, 25A, 5.5kVA, 50/60 Hz, 400V~	Equipment inventory listing[1]
   MA 200 Gen 3 (8" Compact)	Gen 3	—	8-inch wafer size; compact; electrical supply 3 Phase + N + PE, 50/60 Hz; with HDD and software	Equipment inventory listing[2]
   MA 200 Gen 3 (8" Complete PC)	Gen 3	—	8-inch wafer size; complete PC with HDD; 3 Phase; includes BSA and DirectAlign options	Equipment inventory listing[3]

8. 

   MA 200 Mask

   The SUSS MA 200 is a semi-automatic mask aligner capable of processing wafers up to 8 inches in diameter, using UV400 optics and a 365/405 nm sensor.

Sources