Waferpedia

Zeiss

sem2

Metrology & Inspection200mmZeiss sem2 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Zeiss sem2 is a scanning electron microscope used for metrology and inspection.[2]

How it works

General reference — not yet source-verified

A scanning electron microscope scans a focused electron beam across a sample surface and detects signals generated by the beam-sample interaction to form an image.

Metrology and inspection use of a scanning electron microscope centers on visualizing small features, checking pattern fidelity, and examining surface condition at high magnification.

Where it fits in the process flow

General reference — not yet source-verified

Scanning electron microscopy is typically used after fabrication steps that create or modify surface features, when a process engineer needs dimensional inspection or defect review before further processing.

Applications

The Zeiss sem2 supports device characterization tasks that include surface topography analysis and scanning electron microscopy.[2]

The Zeiss sem2 is used for optical microscopy and imaging tasks in the metrology area, including inspection of fine structural detail.[2]

  • Scanning electron microscopy

What do the numbers mean?

Wafer handling1

Wafer size
200 mm[1]
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Configuration & options5

OEM
Zeiss[1]
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Model
sem2[1]
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Equipment name
Zeiss 200 mm Scanning Electron Microscope[1]
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Category
Metrology & Inspection[1]
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Equipment type
Scanning Electron Microscope[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What category of instrument is the Zeiss sem2?

The Zeiss sem2 is a scanning electron microscope.[2]

Where is the Zeiss sem2 used in the laboratory workflow?

The Zeiss sem2 is part of the metrology and inspection area, which supports device characterization.[2]

What kind of measurements does the metrology area support around the Zeiss sem2?

The metrology area supports surface topography analysis, film thickness and optical property measurements, structural and compositional analysis, high resolution optical microscopy, and scanning electron microscopy.[2]

Not publicly documented

The following facts about the sem2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the sem2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the sem2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the sem2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the sem2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the sem2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edu — nanolab.berkeley.edunanolab.berkeley.edu
  2. [2]Metrology — nanolab.berkeley.edunanolab.berkeley.edu
  3. [3]Capabilities — nanolab.berkeley.edunanolab.berkeley.edu
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Last updated Oct 4, 2026.

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