YES
G500
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What it is
How it works
The YES G500 has two powered shelves, providing multiple zones for processing substrates.[2]
Where it fits in the process flow
General reference — not yet source-verifiedThe YES G500 performs a dry plasma cleaning step, which is a surface preparation or removal process that typically follows a photolithography or etching step.
A plasma cleaning system like the YES G500 is often used to remove photoresist residues after etching or to clean substrates before further processing.
Applications
The YES G500 gently cleans substrates without using hazardous solvents.[2]
The YES G500 is used in surface preparation prior to wirebonding or other packaging steps.[2]
- Plasma cleaning
What do the numbers mean?
Configuration & options6
What replaced it?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the G500 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G500 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the G500 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the G500 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the G500 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the G500 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]nanolab.berkeley.edu — nanolab.berkeley.edunanolab.berkeley.edu
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]Etching Systems — nanolab.berkeley.edunanolab.berkeley.edu
- [4]Capabilities — nanolab.berkeley.edunanolab.berkeley.edu
Last updated Oct 5, 2026.
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The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
