Waferpedia

Comparison ledger

1000FPversusG500

YES 1000FP, YES G500, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
G500YES
OEMYESYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyYES 1000FPYES G500
Specifications
System typePlasma cleaning system[1]—
LineR-Series Plasma Cleaning Systems (Glen Technologies)[1]—
ModelGlen/YES 1000FP[1]YES-G500[2]
Designed useDesigned to accept a range of shelf sizes[1]—
Application focusChanging needs of the flat panel industry[1]—
Category—Plasma Cleaning System[2]
Product line description—Plasma Cleaning Systems[3]
Shelves—2 powered shelves[3]
Type—Plasma Cleaning System[2]
Number of powered shelves—2[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]nanolab.berkeley.edunanolab.berkeley.edu
  3. [3]web.archive.orgweb.archive.org