YES

253B-60-63-2

Research Quality: 40% complete

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve. The MKS Type 253B Exhaust Throttle Valve regulates gas removal from a vacuum chamber. The MKS Type 253B Exhaust Throttle Valve uses a nonlinear actuator to produce a more linear valve transfer characteristic.^[1]

YES253B-60-63-2

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What it is

The YES 253B-60-63-2 is an exhaust throttling valve.^[1]

The Type 253B is an MKS exhaust throttle valve in the 253B family.^[1]

What can it run?

Process applications and technology nodes documented for this tool.

vacuum chamber gas removal
use with Roots blower, diffusion, turbo, cryo, or other high vacuum pump

Why won't it start?

Documented failure modes, common issues, and field considerations.

The valve may require routine cleaning due to buildup of process contaminants.

What do the numbers mean?

Power & electrical1

Valve body heater power input: ±15 VDC, 1 Amp, 30 Watts nominal, user-supplied^[1]

Vacuum & pumping3

Product name: MKS Type 253B Exhaust Throttle Valve^[1]
Function: regulates the removal of gas from a vacuum chamber^[1]
Differential pressure across valve: 1 atm. (15 psig) max.^[1]

Wafer handling1

Transfer characteristic: linear valve transfer characteristic^[1]

Dimensions & facilities1

Driver/gear assembly width: 3.75 inch square (95 mm)^[1]

Configuration & options10

Model: 253B-60-63-2^[1]
Valve type: butterfly valve^[1]
Compatible controllers: Type 651, 652, 152G, or 252 (revision D or later) controllers^[1]
Actuator feature: nonlinear actuator between the butterfly shaft and the motor drive shaft^[1]
Mounting flange types: ASA, NW Style ISO, KF Style ISO, CF, JIS^[1]
Connector: 15-pin Type D connector^[1]
Connector cable length: 6 inch pigtail cable^[1]
Valve body heater operating temperature: 80° to 90° C for 20° to 40° C ambient^[1]
External leakage at shaft seal: 1 x 10-7 scc/sec He^[1]
Materials exposed to process: 316L SS, Viton^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
253B-60-63-2	—	—	NW-63 flange, 2.362 in inside diameter, 5.95 in outside diameter, 0.81 in thickness, 4.330 in bolt circle diameter, 4 bolt holes, and no flapper seal are listed for this valve type.	nanofab.utah.edu^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Product nameMKS Type 253B Exhaust Throttle Valve^[1]
Functionregulates the removal of gas from a vacuum chamber^[1]
Valve body heater power input±15 VDC, 1 Amp, 30 Watts nominal, user-supplied^[1]
Differential pressure across valve1 atm. (15 psig) max.^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the equipment type?

The YES 253B-60-63-2 is an exhaust throttling valve.^[1]

What model family does it belong to?

The equipment belongs to the MKS Type 253B family.^[1]

What is its role in a vacuum system?

The valve is used as an exhaust throttle valve in the pumping path of a vacuum system.^[1]

Not publicly documented

The following facts about the 253B-60-63-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-60-63-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 253B-60-63-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 253B-60-63-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 253B-60-63-2 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 253B-60-63-2 are on record.
Answerable by: university cleanroom staff or an OEM application specialist