Tool family
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve used to regulate gas removal from a vacuum chamber with an MKS controller.
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve used to regulate gas removal from a vacuum chamber with an MKS controller.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 253B-60-63-2 | — | — | NW-63 flange, 2.362 in inside diameter, 5.95 in outside diameter, 0.81 in thickness, 4.330 in bolt circle diameter, 4 bolt holes, and no flapper seal are listed for this valve type. | nanofab.utah.edu[1] |