YES
253B-20-40-2
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve. The MKS Type 253B Exhaust Throttle Valve is designed to regulate the removal of gas from a vacuum chamber when used with an MKS controller. The MKS Type 253B Exhaust Throttle Valve is available with KF Style ISO flange options, including model 253B-20-40-2.[1]
What it is
How it works
The Type 253B includes a 15-pin Type D connector.[1]
Where it fits in the process flow
General reference — not yet source-verifiedAn exhaust throttle valve sits on the vacuum exhaust path between a process chamber and the pumping system.
The valve is used where stable chamber pressure must be maintained during vacuum processing.
Applications
- regulating removal of gas from a vacuum chamber
- control of pressure within a vacuum chamber
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The manual states that when operating with high vacuum diffusion pumps, pressure above the oil vapor jet should not exceed 0.5 milliTorr.
- The manual states that process contaminants can permanently damage the unit or contaminate the process.
What do the numbers mean?
Power & electrical2
Vacuum & pumping5
Optics & imaging1
Control & software1
Dimensions & facilities3
Configuration & options28
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 253B-20-40-1 | — | — | Has Viton flapper seal (sealing butterfly valve), closed leakage < 10^-7 Torr l/sec. Controllable conductance range 0.07 - 24 l/sec. Overall height same but flapper seal present. | nanofab.utah.edu[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- TypeExhaust Throttle Valve[1]
- Closed leakage<10^-7 Torr l/sec[1]
- Power input±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1]
- Closed Leakage< 1 x 10^-7 Torr l/s[2]
- DriveMechanical (non belt) drive with integral cosine generator[2]
- Differential Pressure Across Valve1 Atmosphere (15 psig)[2]
- Closed Leakage (sealing version -1)< 10^-7 Torr l/sec[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 253B-20-40-2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 253B-20-40-2 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 253B-20-40-2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 253B-20-40-2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 253B-20-40-2 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 253B-20-40-2 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]nanofab.utah.edu — nanofab.utah.edunanofab.utah.edu
- [2]mks.com — mks.commks.com
- [3]253B-20-40-2 Exhaust Throttle Valve — newport.comnewport.com
Last updated Oct 11, 2026.
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