Waferpedia

Tool family

YES 253B-20-40-2

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate the removal of gas from a vacuum chamber when used with an MKS controller.

Models in this family

  1. The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate the removal of gas from a vacuum chamber when used with an MKS controller.