Temescal
VCT-1800
The Temescal VCT-1800 is a thin film deposition system. The Temescal VCT-1800 can be configured with a fast cycle load lock, sputtering sources, a multi-pocket electron beam gun, and an ion source. The Temescal VCT-1800 has a water-cooled, RF-bias rotating substrate holder with a usable area of seven inches in diameter.[1]
What it is
The Temescal VCT-1800 is a thin-film deposition system.[1]
The VCT-1800 is a configured system that can include a fast cycle load lock, sputtering sources, a multi pocket electron beam gun, and an ion source for etching and ion assisted deposition.[1]
How it works
Where it fits in the process flow
The VCT-1800 is primarily designed for research and development applications.[1]
Applications
The VCT-1800 supports sputter deposition, electron beam deposition, ion-assisted deposition, and etching.[1]
- etching
- ion assisted deposition
- R&D applications
What do the numbers mean?
Power & electrical1
Wafer handling1
- fast cycle load lock, an array of sputtering sources, multi-pocket electron beam gun, and an ion source for etching and ion assisted deposition[1]
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Substrate holderwater cooled, RF bias, rotating substrate holder[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What deposition methods can the VCT-1800 be configured to use?
The VCT-1800 can be configured with sputtering sources, a multi pocket electron beam gun, and an ion source for etching and ion assisted deposition.[1]
What type of substrate handling does the VCT-1800 use?
The VCT-1800 uses a water cooled, RF bias, rotating substrate holder.[1]
What is the usable substrate area on the VCT-1800?
The VCT-1800 has a usable area of seven inches in diameter.[1]
What is the main intended use of the VCT-1800?
The VCT-1800 is primarily designed for research and development applications.[1]
Not publicly documented
The following facts about the VCT-1800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VCT-1800 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the VCT-1800 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VCT-1800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VCT-1800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VCT-1800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]tescal.com — tescal.comtescal.com
Last updated Oct 3, 2026.
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