Waferpedia

SUSS MicroTec

350W MJB3 Mask

The SUSS MicroTec 350W MJB3 Mask Aligner is a mask aligner. The SUSS MicroTec 350W MJB3 Mask Aligner is configured for top-side alignment. The SUSS MicroTec 350W MJB3 Mask Aligner has a maximum wafer size of 3" diameter.[1][2]

SUSS MicroTec logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Wafer Equipment

Power

CIC 500[1]

Vacuum

Vacuum Contact, Hard & Soft[1]

Performance

Top Side Alignment[1]

Optics

3.5x and 10x[1]

What it is

The SUSS MicroTec 350W MJB3 Mask Aligner is a mask aligner used in lithography for semiconductor and related wafer processing.[1][2][3]

The MJB3 Main System is configured for top-side alignment and accepts wafers up to three inches in diameter.[1][2][3]

How it works

The SUSS MicroTec 350W MJB3 uses a CIC 500 power supply, a 350 watt lamphouse, UV400 exposure optics for 365 nanometer and 405 nanometer exposure, and a splitfield microscope for alignment.[1][2][3]

The MJB3 supports vacuum contact, hard contact, and soft contact exposure modes.[1][2][3]

Where it fits in the process flow

The MJB3 is used with a maskholder for four inch by four inch masks and a wafer chuck for wafer handling during alignment and exposure.[1][2][3]

Applications

The SUSS MicroTec 350W MJB3 is used for lithographic exposure work in semiconductor and PCB manufacturing contexts.[1][2][3]

What do the numbers mean?

Power & electrical4

Power supply
CIC 500[1]
Accurate?
Lamphouse
350 watt[1]
Accurate?
Power supply
CIC 500 Power Supply[1]
Accurate?
Lamphouse
350 Watt Lamphouse[1]
Accurate?

Vacuum & pumping1

- Exposure Mode
Vacuum Contact, Hard & Soft[1]
Accurate?

Wafer handling5

Wafer size
Wafer Equipment[1]
Accurate?
- Max Wafer Size
3" Diameter[1]
Accurate?
Wafer size
Suss MicroTec PM5 Manual Analytical Wafer Prober[1]
Accurate?
Wafer chuck
1 included[1]
Accurate?
Wafer chuck
1 included, size unspecified[1]
Accurate?

Optics & imaging6

- Objectives
3.5x and 10x[1]
Accurate?
- Exposure Resolution
0.8 Microns (under optimum conditions)[1]
Accurate?
- Alignment Resolution
0.25um (operator dependant)[1]
Accurate?
Exposure optics
UV400 exposure optics for 365nm and 405nm exposure[1]
Accurate?
Maskholder
1 included for 4"x4" masks[1]
Accurate?
Manual
Operations Manual for Suss MJB3 Mask Aligner[1]
Accurate?

Performance2

Alignment mode
Top Side Alignment[1]
Accurate?
Configured for
Top Side Alignment[1]
Accurate?

Configuration & options5

- Model
MJB3 Main System[1]
Accurate?
- Manufacturer
Suss MicroTec / Karl Suss[1]
Accurate?
- Eyepieces
10x[1]
Accurate?
Microscope
Suss M230 Splitfield Microscope[1]
Accurate?
Bulb
Brand new 350W bulb, qty. 1 included[1]
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed[1]

  • Configured for Top Side Alignment
  • CIC 500 Power Supply
  • 350 Watt Lamphouse
  • Exposure resolution 0.8 microns under optimum conditions
  • Alignment resolution 0.25 µm, operator dependant
  • 1 maskholder included for 4"x4" masks
  • 1 wafer chuck included
  • Brand new 350W bulb, qty. 1 included
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • - Exposure ModeVacuum Contact, Hard & Soft[1]
  • Power supplyCIC 500[1]
  • Lamphouse350 watt[1]
  • Power supplyCIC 500 Power Supply[1]
  • Lamphouse350 Watt Lamphouse[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the SUSS MicroTec 350W MJB3 Mask Aligner accept?

The SUSS MicroTec 350W MJB3 Mask Aligner has a maximum wafer size of 3 inches in diameter.[1][2][3]

What exposure modes does the SUSS MicroTec 350W MJB3 Mask Aligner support?

The SUSS MicroTec 350W MJB3 Mask Aligner supports vacuum contact, hard, and soft exposure modes.[1][2][3]

What illumination and optics are used on the SUSS MicroTec 350W MJB3 Mask Aligner?

The SUSS MicroTec 350W MJB3 Mask Aligner uses a 350 watt lamphouse and UV400 exposure optics for 365 nm and 405 nm exposure.[1][2][3]

What alignment optics are included on the SUSS MicroTec 350W MJB3 Mask Aligner?

The SUSS MicroTec 350W MJB3 Mask Aligner includes a splitfield microscope. One configuration includes an M230 microscope with 10x eyepieces and 3.5x and 10x objectives, and another includes an M400 microscope with 10x eyepieces and 3.2x, 10x, and 20x objectives.[1][2][3]

Not publicly documented

The following facts about the 350W MJB3 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 350W MJB3 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 350W MJB3 Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 350W MJB3 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 350W MJB3 Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 350W MJB3 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]dealer listingwotol.com
  2. [2]Suss 350W MJB3 Mask Aligner | Refurbished | ClassOne — classoneequipment.comclassoneequipment.com
  3. [3]Suss MJB3 Mask Aligner | Refurbished | ClassOne Equipment — classoneequipment.comclassoneequipment.com
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Last updated Oct 9, 2026.

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