Waferpedia

Specialty Coating Systems

PC Spray

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

PC Spray — Inventory photo
Fig. 01PC SprayInventory photo[1]

Power

50/80 Hz[1]

Gas delivery

Resist Processing[2]

What it is

The Specialty Coating Systems (SCS) PC Spray is a spray coater used for resist processing. The model is designated PC.[1][2]

How it works

General reference — not yet source-verified

A spray coater atomises a liquid coating material into a fine mist, which is then deposited onto a substrate to form a thin film. The substrate is typically held on a heated platen to accelerate solvent evaporation and film solidification.

In resist processing, spray coating is often employed as an alternative to spin coating, particularly for substrates where uniform coverage or thick films are required, or where backside coating must be avoided.

Where it fits in the process flow

General reference — not yet source-verified

Downstream processes include exposure, development, and postbake. The spray coater is thus an integral part of the photoresist application stage in semiconductor and thin-film fabrication.

Applications

General reference — not yet source-verified

The equipment is suited for development and production environments where sprayed coatings are preferred over spin-on or dip methods, offering flexibility in film thickness and substrate geometry.

What do the numbers mean?

Power & electrical2

50/80 Hz[1]
Accurate?
Power frequency
50/80 Hz[1]
Accurate?

Gas & chemistry1

Category
Resist Processing[2]
Accurate?

Control & software2

Model
PC[1]
Accurate?
Tool name
PC Spray Coater[1]
Accurate?

Configuration & options2

Phase
1 Phase[1]
Accurate?
OEM
Specialty Coating Systems (SCS)[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/80 Hz[1]
  • Power frequency50/80 Hz[1]
  • CategoryResist Processing[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the equipment?

It is a Specialty Coating Systems (SCS) PC Spray Coater, model PC.[1]

Not publicly documented

The following facts about the PC Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PC Spray are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PC Spray are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PC Spray are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the PC Spray are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the PC Spray is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 11, 2026.

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