Waferpedia

Comparison ledger

100 SpinversusPC Spray

CEE 100 Spin, Specialty Coating Systems PC Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PC SpraySpecialty Coating Systems
OEMCEESpecialty Coating Systems
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Specialty Coating Systems (SCS) PC Spray
Specifications
ConfigurationVolts 115[1]50/80 Hz[2]
Phase—1 Phase[2]
OEM—Specialty Coating Systems (SCS)[2]
Model—PC[2]
Tool name—PC Spray Coater[2]
Power frequency—50/80 Hz[2]
Category—Resist Processing[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com