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Semitool

Rhetech 280 S 6 1 E LH SRD

Semitool Rhetech 280 S 6 1 E LH SRD family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Semitool Rhetech 280 S 6 1 E LH is a spin rinse dryer (SRD) used in semiconductor manufacturing.[1]

What do the numbers mean?

Configuration & options5

Equipment type
Spin Rinse Dryer (SRD)[1]
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Manufacturer
Semitool / Rhetech[1]
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Model
280 S 6 1 E LH[1]
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Asset number
142201[1]
Accurate?
Vintage
2008[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Rhetech 280 S 6 1 E LH SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rhetech 280 S 6 1 E LH SRD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Rhetech 280 S 6 1 E LH SRD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Rhetech 280 S 6 1 E LH SRD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Rhetech 280 S 6 1 E LH SRD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Rhetech 280 S 6 1 E LH SRD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Sep 28, 2026.

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