Semitool

421 Scepter Spray Solvent

Wet Processing / Clean Batch Solvent Processor for Wafer Cleaning Semitool 421 family

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421 Scepter Spray Solvent — Inventory photo — Fig. 01421 Scepter Spray SolventInventory photo^[1]

Wafer size

Batch Solvent Processor for Wafer Cleaning

Vacuum

Pneumatic pumps, Trebor 610 back^[4]

Gas delivery

Scepter Spray Solvent Tool (SST)^[1]

How it works

The Semitool 421 SST is equipped with four stainless steel chemical tanks, two of which are heated and two are ambient. A single rotor is included to hold wafers during processing.^[3]^[4]

What do the numbers mean?

Vacuum & pumping1

Pumps: Pneumatic pumps, Trebor 610 back^[4]

Wafer handling8

Wafer size: Batch Solvent Processor for Wafer Cleaning^[1]; Max Substrate Size of 8”/200mm^[1]; Single Chamber System Capable of processing up to 50 wafers^[1]
Maximum substrate size: 200 mm (8 inch)^[1]
Batch capacity: Up to 50 wafers^[2]
Process applications: Polymer removal, resist stripping, wafer cleaning, metal lift-off^[3]
Wafer size: 200 mm (8 inch)^[1]
Maximum wafer count per batch: 50 wafers^[1]

Gas & chemistry1

Also known as: Scepter Spray Solvent Tool (SST)^[1]

Configuration & options8

Chamber type: Single chamber^[2]
Automation level: Semi-automated^[2]
Number of tanks: 4 stainless steel (2 heated, 2 ambient)^[3]
OEM model number: SST-421^[3]
Number of tanks: 4^[3]
Number of heated tanks: 2^[3]
Rotor included: 1 rotor (select size at time of order)^[3]
Touch screen: Class 1 Touch Screen Monitor^[4]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
SST 421-280	—	—	Upgraded with hfsemi CPU system, class 1 touch screen monitor, pneumatic pumps, Trebor 610 back	hfsemi.com^[4]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Also known asScepter Spray Solvent Tool (SST)^[1]
PumpsPneumatic pumps, Trebor 610 back^[4]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Semitool 421 handle?

The Semitool 421 is specified for 8 inch wafers and for a maximum substrate size of 8 inch or 200 mm.^[1]^[3]^[4]

How many chambers does the Semitool 421 have?

The Semitool 421 is a single-chamber system.^[1]^[3]

Not publicly documented

The following facts about the 421 Scepter Spray Solvent are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 421 Scepter Spray Solvent are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 421 Scepter Spray Solvent are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 421 Scepter Spray Solvent are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 421 Scepter Spray Solvent is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 421 Scepter Spray Solvent are on record.
Answerable by: an OEM parts catalog or a service engineer