OAI
Model 212
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The OAI Model 212 is a tabletop mask aligner designed for large-area substrates. The Model 212 is intended for research and development applications. The aligner handles substrates up to 12 inches by 12 inches.[1]
How it works
General reference — not yet source-verifiedA mask aligner operates by positioning a substrate on a stage and bringing a photomask into proximity or contact with the substrate. Ultraviolet light from a source passes through the mask, exposing areas of the photoresist and creating a latent image of the mask pattern. Alignment is achieved through mechanical or optical adjustments that align alignment marks on the mask with corresponding marks on the substrate. The OAI Model 212, as a tabletop aligner, is expected to use manual or semi-automatic alignment mechanics typical of that class.
What can it run?
Process applications and technology nodes documented for this tool.
- Large area substrates
What do the numbers mean?
Wafer handling1
Optics & imaging2
What replaced it?
Related models
- siblingOAI Model 6020— Listed under the same 'Mask Aligners' datasheet section on the resources page.source[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Model 212 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Model 212 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Model 212 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Model 212 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Model 212 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Model 212 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]oainet.com — oainet.comoainet.com
- [2]Resources – Optical Associates, Inc. — oainet.comoainet.com
Last updated Oct 9, 2026.
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