Waferpedia

Comparison ledger

017-0024-01 PrealignerversusModel 212

Brooks 017-0024-01 Prealigner, OAI Model 212, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrooksOAI
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerOAI Model 212
Specifications
Type—Large Area Mask Aligner[1]
Form factor—Tabletop Mask Aligner[1]
Substrate size—up to 12″x12″[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]oainet.comoainet.com