Mattson
Paradigme
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Mattson Paradigme is an etch system used in semiconductor manufacturing. The Mattson Paradigme is a dry etcher designed for advanced pattern-etch applications in integrated circuit fabrication. The Mattson Paradigme was designed for use at the 20-nanometer technology node and below.[1][2]
What it is
How it works
The paradigmE uses a proprietary plasma source that enables advanced etch performance in a two-wafer chamber design.[2]
The two-wafer chamber design processes two wafers simultaneously, combining high throughput with etch results comparable to single-wafer vacuum chambers.[2]
Mattson Technology's paradigmE etch system supports multi-pattern etch techniques including dual pattern transfer (DPT), quadruple pattern transfer (QPT), and spacer-defined double patterning (SDDP).[2]
Where it fits in the process flow
The paradigmE was designed for use at the 20-nanometer technology node and below, where multi-pattern etching enables the production of features smaller than the limits of immersion lithography.[2]
Applications
The paradigmE etch system is used for advanced etch applications, including advanced pattern multiplying etches for the production and development of leading-edge integrated circuits.[2]
The system supports applications for 3D transistor and 3D memory array devices.[2]
Multi-pattern etch techniques performed on the paradigmE—such as dual pattern transfer, quadruple pattern transfer, and spacer-defined double patterning—provide alternatives for producing features smaller than the current limits of immersion lithography.[2]
What do the numbers mean?
Wafer handling2
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Paradigme XP Light | — | 2010 | Light Etch version | waferpedia.com[4] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What wafer size does the Mattson Paradigme support?
The Paradigme XP Light variant supports 300 mm wafers.[4]
What types of etch applications is the Paradigme designed for?
The Paradigme is designed for advanced etch applications, including advanced pattern multiplying etches for the production and development of leading-edge integrated circuits.[1][2]
What multi-pattern etch techniques does the Paradigme support?
The Paradigme supports dual pattern transfer, quadruple pattern transfer, and spacer-defined double patterning.[1][2]
Not publicly documented
The following facts about the Paradigme are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Paradigme are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Paradigme are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Paradigme are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Paradigme is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Paradigme are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]semiconductoronline.com — semiconductoronline.comsemiconductoronline.com
- [3]Equipment inventory listing
- [4]waferpedia.com — waferpedia.comwaferpedia.com
- [5]Equipment inventory listing
Last updated Oct 3, 2026.
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