Waferpedia

Laurell

WS-650-8

Spin coater200mmLaurell WS-650-8 family
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The Laurell WS-650-8B is a spin coater. The Laurell WS-650-8B accommodates up to 200mm wafers and 7" x 7" substrates. The Laurell WS-650-8B features a maximum rotational speed of 12,000 RPM based on a 100mm silicon wafer.[1][2][3]

WS-650-8 — web.archive.org
Fig. 01WS-650-8web.archive.org[1]

Wafer size

200mm

Power

95 to 240VAC, 47/63HZ, ~300 Watts[1]

What it is

The WS-650-8 belongs to Laurell's 650-series spin coater line.[1][2][3]

How it works

The WS-650-8 uses a process controller that allows real-time operator interaction during a run, including pausing, stopping, and continuing the process.[1][2][3]

The WS-650-8 uses a closed bowl design with a labyrinth seal and nitrogen purge to reduce chemical contamination of the motor and electronics and to support cleaner coating conditions.[1][2][3]

Where it fits in the process flow

The WS-650 series is typically employed for coating, etching, developing, rinsing-drying, and cleaning in solvent, base, or acid-based processing.[1][2][3]

Applications

The WS-650-8 accommodates up to ø 200 mm wafers and 7 inch by 7 inch substrates.[1][2][3]

  • Coating
  • Etching
  • Developing
  • Rinsing-drying
  • Cleaning

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • The source says Laurell recommends single-use only due to known material conflicts.
  • The source gives examples of photoresist/developer cross-contamination and SC-1/SC-2 creating NH4Cl as a hazardous inhalation risk.

What do the numbers mean?

Power & electrical2

Power requirement
95 to 240 VAC, 47/63 Hz, approximately 300 W[1]
Accurate?
Power
95 to 240VAC, 47/63HZ, ~300 Watts[1]
Accurate?

Vacuum & pumping1

Vacuum suggestion
25 to 28 inches Hg; 4.5 SCFM at 0 inches Hg[1]
Accurate?

Wafer handling5

Wafer capacity
Up to 200 mm wafers[1]
Accurate?
Substrate capacity
Up to 7 in x 7 in (178 mm x 178 mm) substrates[1]
Accurate?
Basis for max speed rating
Based on a 100 mm silicon wafer[1]
Accurate?
Substrate capacity
Up to 7" x 7" (178mm x 178mm) substrates[1]
Accurate?
Speed reference condition
Based on a 100mm silicon wafer[1]
Accurate?

Control & software2

Process controller
650-series process controller with robust microprocessor and accompanying PC software[1]
Accurate?
Process controller
650-series process controller[1]
Accurate?

Dimensions & facilities1

Nitrogen/CDA process/seal purge
60 to 70 PSIG (4 to 5 bar)[1]
Accurate?

Configuration & options6

Product type
Spin coater[1]
Accurate?
Series
650-series[1]
Accurate?
Maximum rotational speed
12,000 RPM[1]
Accurate?
Applications
Coating, etching, developing, rinsing-drying, and cleaning[1]
Accurate?
Model
WS-650-8B[1]
Accurate?
Category
Spin coater[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
WS-650-8B———web.archive.org[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power requirement95 to 240 VAC, 47/63 Hz, approximately 300 W[1]
  • Vacuum suggestion25 to 28 inches Hg; 4.5 SCFM at 0 inches Hg[1]
  • Power95 to 240VAC, 47/63HZ, ~300 Watts[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What kinds of materials are processed on a spin coater?General reference — not yet source-verified

Such machines are used with photoresists, polymers, dielectric coatings, and other liquids that can form a uniform film when spun.

What determines the final film quality in this class of machine?General reference — not yet source-verified

Final film quality depends on the liquid properties, dispense method, rotation profile, drying behavior, and the condition of the substrate surface.

Not publicly documented

The following facts about the WS-650-8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the WS-650-8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the WS-650-8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the WS-650-8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the WS-650-8 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the WS-650-8 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
  3. [3]web.archive.org — web.archive.orgweb.archive.org
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Last updated Oct 5, 2026.

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