Laurell

Lz-23

Research Quality: 50% complete

The Laurell Lz-23 B is a spin coater. The Laurell Lz-23 B accommodates up to 150mm wafers and 5 inch by 5 inch substrates. The Laurell Lz-23 B has a maximum rotational speed of 12,000 RPM based on a 100mm silicon wafer.^[1]

Lz-23 — web.archive.org — Fig. 01Lz-23web.archive.org^[1]

What it is

The Lz‐23 B variant accommodates substrates up to 150 mm diameter wafers and 5 inch × 5 inch (127 mm × 127 mm) squares, and can reach a maximum rotational speed of 12 000 RPM (measured with a 100 mm silicon wafer).^[1]

How it works

The Lz‐23 uses a 650‑series microprocessor‑based process controller that allows real‑time operator interaction (pausing, stopping, continuing) during a run, and can be updated in the field with downloadable firmware.^[1]

A proprietary labyrinth seal, pressurized with nitrogen or CDA, protects the motor and electronics from chemical contamination and provides a nitrogen purge to the process chamber. An interlock prevents rotation when the vacuum is not engaged or when the lid is open.^[1]

What can it run?

Process applications and technology nodes documented for this tool.

Solvent-based processing
Base-based processing
Acid-based processing
Coating
Etching
Developing
Rinsing-drying
Cleaning

What do the numbers mean?

Power & electrical1

Power: 95 to 240 VAC, 47/63 Hz, approximately 300 W^[1]

Vacuum & pumping1

Vacuum suggestion: 25–28 inches Hg with a flow volume of 4.5 SCFM at 0 inches Hg^[1]

Wafer handling6

Maximum wafer size: Up to 150 mm wafers^[1]
Substrate size: 5 in × 5 in (127 mm × 127 mm)^[1]
Maximum rotational speed: 12,000 RPM (based on a 100 mm silicon wafer)^[1]
Wafer size: up to 150mm^[1]
Substrate size: 5 inch x 5 inch (127mm x 127mm)^[1]
Speed basis: based on a 100mm silicon wafer^[1]

Control & software2

Process controller: 650-series process controller^[1]
Controller: 650-series process controller^[1]

Dimensions & facilities1

Nitrogen/CDA process/seal purge: 60–70 PSIG (4–5 bar)^[1]

Configuration & options4

Series: 650-series^[1]
Model: Lz-23 B^[1]
Category: Spin coater^[1]
Maximum rotational speed: 12,000 RPM^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Lz-23 B	—	—	—	web.archive.org^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power95 to 240 VAC, 47/63 Hz, approximately 300 W^[1]
Vacuum suggestion25–28 inches Hg with a flow volume of 4.5 SCFM at 0 inches Hg^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Lz-23 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Lz-23 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Lz-23 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Lz-23 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Lz-23 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Lz-23 are on record.
Answerable by: an OEM parts catalog or a service engineer