Lam Research
SEZ 203 Spin Processor /
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SEZ 203 Spin Processor is an etch tool manufactured by Lam Research. The SEZ 203 Spin Processor handles 8-inch wafers. The SEZ 203 Spin Processor uses Bernoulli wafer handling, a Bernoulli chuck, and Bernoulli grippers.[1][2]
What it is
What do the numbers mean?
Wafer handling3
Gas & chemistry1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Chemical cabinets3 chemical cabinets (CDS)[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the SEZ 203?
The SEZ 203 is a spin processor and etcher.[3]
How many chemical cabinets does the tool have?
Three chemical cabinets (CDS).[2]
What type of wafer handling does it use?
Bernoulli-type non-contact handling, including a Bernoulli chuck and Bernoulli grippers.[2]
How many cassettes does it have?
Two open cassettes.[2]
Not publicly documented
The following facts about the SEZ 203 Spin Processor / are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEZ 203 Spin Processor / are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SEZ 203 Spin Processor / are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SEZ 203 Spin Processor / are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEZ 203 Spin Processor / are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEZ 203 Spin Processor / is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]tech-semi.com — tech-semi.comtech-semi.com
- [3]Equipment inventory listing
Last updated Sep 29, 2026.
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