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Lam Research

Alliance A 6 TCP 9600 PTX Metal

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Alliance A 6 TCP 9600 PTX Metal — Inventory photo
Fig. 01Alliance A 6 TCP 9600 PTX MetalInventory photo[1]

What is it?

The Lam Research Alliance A 6 TCP 9600 PTX Metal is an etch tool for 8 inch wafers.

What do the numbers mean?

Power & electrical3

Phase
3 Phase[1]
Accurate?
Voltage
208 Vac[1]
Accurate?
Power & electrical
3 Phase - 4 Wire + Ground - 208 Vac[3]
Accurate?

Wafer handling1

Wafer size
8 inch[3]
Accurate?

Configuration & options5

OEM
Lam Research[3]
Accurate?
Model
Alliance A 6 TCP 9600 PTX Metal[3]
Accurate?
Category
Etch[4]
Accurate?
Chambers
(2) 9600PTX Chambers[3]
Accurate?
Chambers
(2) Microwave Strip Chambers[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Voltage208 Vac[1]
  • Power & electrical3 Phase - 4 Wire + Ground - 208 Vac[3]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Alliance A 6 TCP 9600 PTX Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance A 6 TCP 9600 PTX Metal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Alliance A 6 TCP 9600 PTX Metal are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Alliance A 6 TCP 9600 PTX Metal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Alliance A 6 TCP 9600 PTX Metal are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Alliance A 6 TCP 9600 PTX Metal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]waferpedia.comwaferpedia.com
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Last updated Oct 5, 2026.

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