Lam Research
9600 TCP Metal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research 9600 TCP Metal is a plasma etch system. The Lam Research 9600 TCP Metal is designed for high-aspect-ratio etching of metals and dielectrics. The Lam Research 9600 TCP Metal supports 6-inch (150mm) and 8-inch (200mm) wafers.[1]
What it is
How it works
The 9600 TCP uses transformer coupled plasma technology. Transformer coupled plasma creates a high-density plasma that supports directional etching and controlled material removal.[1]
What do the numbers mean?
Power & electrical1
- with 3 HALO generators[2]
Wafer handling2
Optics & imaging1
Control & software1
Configuration & options4
- mostly complete[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configurationwith 3 HALO generators[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What plasma source does the 9600 TCP use?
The 9600 TCP uses transformer coupled plasma.[1]
Not publicly documented
The following facts about the 9600 TCP Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9600 TCP Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9600 TCP Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9600 TCP Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9600 TCP Metal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9600 TCP Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]junr.com.cn — junr.com.cnjunr.com.cn
- [2]inventory listing
- [3]https://www.galiso.com/PDFManuals/21-11-1156.pdf — galiso.comgaliso.com
- [4]LAM 9600, TCP Metal Etch System – JTM Technologies, Inc. — jtmtechnologies.comjtmtechnologies.com
Last updated Oct 7, 2026.
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