KLA

Inspex Eagle

Test & Probe 8"KLA Inspex Eagle family

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Inspex Eagle — Inventory photo — Fig. 01Inspex EagleInventory photo^[1]

How it works

The KLA Inspex Eagle is equipped with a Zeiss microscope for defect review.^[1]^[3]^[2]^[4]

Applications

The KLA Inspex Eagle is used for patterned wafer laser inspection.^[2]^[4]

What do the numbers mean?

Wafer handling8

Chuck, 6”^[1]
Wafer size: Wafer capability 4” up to 8"^[1]; Cassette to cassette handling^[1]
Chuck: 6"^[1]
Wafer capability: 4" up to 8"^[1]
Wafer handling: Cassette to cassette^[1]
Wafer size: 150mm capable (4" up to 8")^[2]
Inspection type: Patterned Wafer Laser Inspection^[2]

Configuration & options8

Prealigner, 6”^[1]; (2) Ports^[1]; Zeiss Microscope^[1]; Including manuals^[1]
Prealigner: 6"^[1]
Ports: 2^[1]
Microscope: Zeiss Microscope^[1]
Manuals: Including manuals^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the KLA Inspex Eagle support?

The KLA Inspex Eagle handles wafers from 4 inches up to 8 inches in diameter.^[1]^[3]^[2]^[4]^[5]

What type of inspection does the KLA Inspex Eagle perform?

The KLA Inspex Eagle performs patterned wafer laser inspection.^[2]^[4]

Does the KLA Inspex Eagle include cassette-to-cassette wafer handling?

Yes, the system provides cassette-to-cassette wafer handling.^[1]^[3]^[2]^[4]

Not publicly documented

The following facts about the Inspex Eagle are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Inspex Eagle are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Inspex Eagle are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Inspex Eagle are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Inspex Eagle are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Inspex Eagle is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]Inventory photo
[2]solutions-on-silicon.com — solutions-on-silicon.comsolutions-on-silicon.com
[3]Inspex Eagle — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[4]https://www.solutions-on-silicon.com/web/content/67673?unique=1d4377c499a714648a5cfce8d88b019c790ebb39&download=true — solutions-on-silicon.comsolutions-on-silicon.com
[5]KLA Inspex Eagle Wafer Inspection for sale — fabsurplus.comfabsurplus.com