KLA
Candela CS 20 R Dual Surface
What it is
The KLA Candela CS 20 R Dual Surface is a metrology and inspection system for wafer inspection.[1][2]
How it works
General reference — not yet source-verifiedA dual-surface inspection system examines both sides of a wafer to detect defects or surface irregularities.
Metrology and inspection tools in this class use optical measurement and inspection methods to evaluate wafer condition without removing material.
Where it fits in the process flow
General reference — not yet source-verifiedA wafer inspection system sits in the process flow where wafers are checked after fabrication steps that can introduce surface defects, particles, or handling damage.
A metrology and inspection tool supports process control by identifying wafers that require rework, review, or exclusion from later manufacturing steps.
Applications
What do the numbers mean?
Power & electrical8
Wafer handling1
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What class of tool is the Candela CS 20 R Dual Surface?
The Candela CS 20 R Dual Surface is a metrology and inspection system.[2]
Not publicly documented
The following facts about the Candela CS 20 R Dual Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 R Dual Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela CS 20 R Dual Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela CS 20 R Dual Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 20 R Dual Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 20 R Dual Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
