Waferpedia

Comparison ledger

.498 PSL WaferversusCandela CS 20 R Dual Surface

KLA .498 PSL Wafer, KLA Candela CS 20 R Dual Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA Candela CS 20
Specifications
ConfigurationNIST Traceable[1]115 Volts AC[2]
NIST traceabilityYes[1]—
Manufacturer—KLA[2]
Model—Candela CS 20 R Dual Surface[2]
Category—Metrology & Inspection[3]
Wafer sizes—6 inch, 8 inch[2]
Power—115 Volts AC[2]
Current—12 Amps[2]
Phase—Single phase[2]
Frequency—60/60 Hz[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com