CHA

Mark 40 CV RH-PC/PLC Vacuum

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The CHA Mark 40 CV RH-PC/PLC is a vacuum evaporator, a type of deposition tool. The CHA Mark 40 CV RH-PC/PLC includes a 26-inch diameter by 26-inch long process chamber and a CHA SmartSource electron beam gun.^[1]^[2]^[3]

Mark 40 CV RH-PC/PLC Vacuum — Inventory photo — Fig. 01Mark 40 CV RH-PC/PLC VacuumInventory photo^[1]

Power

120/280 V^[1]

Vacuum

Brooks CTI On-Board 400 Cryopump^[1]

What it is

The CHA Mark 40 CV RH-PC/PLC Vacuum is a vacuum evaporator used for deposition.^[1]^[2]^[3]

The CHA Mark 40 CV RH-PC/PLC Vacuum is a chamber-based thin-film deposition system with electron-beam evaporation hardware.^[1]^[3]

How it works

The CHA Mark 40 CV RH-PC/PLC Vacuum includes a CHA SmartSource Electron Beam Gun with motor-driven crucible rotation and lid lift.^[1]^[3]

The CHA Mark 40 CV RH-PC/PLC Vacuum includes a vacuum main folding, a VAT high-vac valve, a Brooks CTI on-board water pump package and compress, a Brooks CTI on-board 400 cryopump, an Ebara Model EV-A10-2U dry pump, and a Granville-Phillips Model 307 digital ionization gauge controller.^[1]^[3]

Where it fits in the process flow

The CHA Mark 40 CV RH-PC/PLC Vacuum supports deposition inside a 26 inch diameter by 26 inch long process chamber.^[1]^[3]

Applications

The CHA Mark 40 CV RH-PC/PLC Vacuum is equipped with lift-off fixturing, a source viewing mirror array, a flag shutter assembly, soft vent, soft roughing, and an RGA isolation valve and interlock with Hi-Vac valve.^[1]^[3]

What do the numbers mean?

Power & electrical4

System Wiring: 120/280 V^[1]
Phase: 3 Phase, 5 Wire, 60 cycle^[1]; Single Service Electrical Drop Box^[1]
Electrical Drop Box: Single Service Electrical Drop Box^[1]

Vacuum & pumping9

Brooks CTI On-Board Water Pump Package and Compress^[1]; Brooks CTI On-Board 400 Cryopump^[1]; Ebara Model EV-A10-2U Dry Pump^[1]; Vacuum Main Folding^[1]; Soft Roughing^[1]
Cryopump Model: Brooks CTI On-Board 400 Cryopump^[1]
Dry Pump Model: Ebara Model EV-A10-2U Dry Pump^[1]
High-Vacuum Valve: VAT High-Vac Valve^[1]
Soft Roughing: Present^[1]

Optics & imaging1

Electron Beam Gun: CHA SmartSource Electron Beam Gun with Motor Driven Crucible Rotation and Lid Lift^[1]

Control & software4

CTI On-Board Auto Regeneration Control^[1]; Granville-Phillips Model 307 Digital Ionization Gauge Controller^[1]
Ionization Gauge Controller: Granville-Phillips Model 307 Digital Ionization Gauge Controller^[1]
Auto Regeneration Control: CTI On-Board Auto Regeneration Control^[1]

Configuration & options22

26" Diameter by 26" Long Process Chamber^[1]; Water Cooled Chamber Front Door^[1]; Hinged Rear Chamber Door^[1]; Complete Sets of Chamber Shields^[1]; VAT High-Vac Valve^[1]; Modern Metal Cabinet^[1]; Soft Vent^[1]; Lift-Off Fixturing^[1]; Source Viewing Mirror Array^[1]; Flag Shutter Assembly^[1]
Process Chamber Diameter: 26 inches^[1]
Process Chamber Length: 26 inches^[1]
Chamber Door Type: Water Cooled Chamber Front Door^[1]
Rear Chamber Door: Hinged Rear Chamber Door^[1]
Chamber Shields: Complete Sets of Chamber Shields^[1]
Cabinet: Modern Metal Cabinet^[1]
Soft Vent: Present^[1]
Lift-Off Fixturing: Present^[1]
Source Viewing Mirror Array: Present^[1]
Flag Shutter Assembly: Present^[1]
RGA Isolation Valve and Interlock: Present^[1]
System Indication Light Tower: Present^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

System Wiring120/280 V^[1]
Phase3 Phase, 5 Wire, 60 cycle^[1]
ConfigurationBrooks CTI On-Board Water Pump Package and Compress^[1]
ConfigurationBrooks CTI On-Board 400 Cryopump^[1]
ConfigurationEbara Model EV-A10-2U Dry Pump^[1]
ConfigurationVacuum Main Folding^[1]
ConfigurationSingle Service Electrical Drop Box^[1]
ConfigurationSoft Roughing^[1]
Cryopump ModelBrooks CTI On-Board 400 Cryopump^[1]
Dry Pump ModelEbara Model EV-A10-2U Dry Pump^[1]
High-Vacuum ValveVAT High-Vac Valve^[1]
Electrical Drop BoxSingle Service Electrical Drop Box^[1]
Soft RoughingPresent^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Mark 40 CV RH-PC/PLC Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 40 CV RH-PC/PLC Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 40 CV RH-PC/PLC Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 40 CV RH-PC/PLC Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 40 CV RH-PC/PLC Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 40 CV RH-PC/PLC Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]Inventory photo
[2]Mark 40 CV RH-PC/PLC Vacuum — CHA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[3]CHA Mark 40 CV RH-PC/PLC Vacuum Evaporator | SemiStar — semistarcorp.comsemistarcorp.com