Waferpedia

Applied Materials

UVision 600 SP

The Applied Materials UVision 600 SP is an inspection system that uses deep UV illumination. The Applied Materials UVision 600 SP handles wafers with a FOUP loading configuration supporting 2 positions. The Applied Materials UVision 600 SP operates on Windows XP.[1]

UVision 600 SP — Inventory photo
Fig. 01UVision 600 SPInventory photo[1]

What it is

The Applied Materials UVision 600 SP is a metrology and inspection system.[1]

The Applied Materials UVision 600 SP is configured for FOUP loading with two loadport positions.[1]

Where it fits in the process flow

The Applied Materials UVision 600 SP is suited to carrier-based material movement because the configuration includes FOUP loading and loadport handling.[1]

Applications

General reference — not yet source-verified

Metrology and inspection systems are used for semiconductor process inspection, defect screening, and condition verification on production material.

What do the numbers mean?

Wafer handling1

Carrier Reader ID
OHT[1]
Accurate?

Optics & imaging1

Illumination
Deep UV[1]
Accurate?

Control & software2

Operating software
Windows XP[1]
Accurate?
Software Version
7.5_1[1]
Accurate?

Configuration & options8

Loading Configuration
FOUP, 2 positions[1]
Accurate?
Loadport - ASYST Isoport[1]
Accurate?
SW_Version - 7.5_1[1]
Accurate?
Operation Console[1]
Accurate?
Yaskawa Teach Pendent[1]
Accurate?
TKM PDC Deep UV[1]
Accurate?
Loadport
ASYST Isoport[1]
Accurate?
Vintage
2008[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of equipment is the Applied Materials UVision 600 SP?

The Applied Materials UVision 600 SP is a metrology and inspection system.[1]

What loading configuration is given for the Applied Materials UVision 600 SP?

The Applied Materials UVision 600 SP is configured for FOUP loading with two loadport positions.[1]

Not publicly documented

The following facts about the UVision 600 SP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UVision 600 SP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UVision 600 SP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UVision 600 SP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the UVision 600 SP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the UVision 600 SP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Oct 10, 2026.

Compare with similar tools

View all →