Waferpedia

Comparison ledger

UVision 600 SPversus.204 PSL Wafer

Applied Materials UVision 600 SP, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
UVision 600 SPApplied Materials
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials UVisionKLA .204 PSL Wafer
Specifications
Loading ConfigurationFOUP, 2 positions[1]—
ConfigurationLoadport - ASYST Isoport[1]NIST Traceable[2]
Carrier Reader IDOHT[1]—
Operating softwareWindows XP[1]—
Software Version7.5_1[1]—
LoadportASYST Isoport[1]—
IlluminationDeep UV[1]—
Vintage2008[1]—
Wafer Size—8 inch[2]
Traceability—NIST[3]
Compatible Tools—Surfscan 6xy0, Sp1[2]
NIST Traceable—Yes[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com