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Manufacturer

ASML

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97 entries

  1. SERV.470.54502ASML
    CategoryWet Processing / Clean
  2. PAS 5500 60ASML

    The ASML PAS 5500/60 is a sub-half-micron i-line stepper for 200 mm wafers with 450 nm resolution.

  3. PAS 5500 850 DASML

    The ASML PAS 5500/850 D is a scanner for 6-inch wafers, using a Cymer ELS-6610 light source and supporting R type, 1.2 mm notch and flat wafers.

    CategoryLithography
  4. Twinscan XT 1700 i ImmersionASML

    The ASML Twinscan XT 1700 i Immersion Scanner is a 193nm immersion lithography system described as being used for volume chip production at 45nm mode.

    CategoryLithography
  5. 5500 350 CASML

    The ASML PAS 5500/350C is a DUV stepper for photolithography, typically used in a cluster with a TEL Clean Track ACT-8 coater/developer for 100 mm wafers. The system dates from 1997.

    CategoryLithography
  6. PAS 5500 275 i-LineASML

    The ASML PAS 5500 275 i-Line is an i-line stepper for 8 inch wafers.

    CategoryLithography
  7. XT 1700 Fi Immersion ARFASML
    CategoryLithography
  8. PAS 5500 300 C DUVASML

    ASML PAS 5500 / 300 C is a DUV stepper described as a deep ultraviolet lithography system.

    CategoryLithography
  9. Twinscan NXT 1980 iASML

    The ASML Twinscan NXT 1980 i is a 12-inch wafer lithography scanner that was upgraded from the 1970i model.

    CategoryLithography
  10. PAS 5000 55 AASML

    ASML PAS 5000 / 55 A is a stepper identified with an option set that includes Wafer Tilt Monitor.

    CategoryLithographyWaferWafer Tilt Monitor
  11. XT 1250 DASML

    The ASML XT 1250 D is a lithography scanner.

    CategoryLithography
  12. PAS 5500 60 i-LineASML
    CategoryLithography
  13. Twinscan XT 400 F i-LineASML

    The ASML Twinscan XT 400 F is an i-line scanner for 300 mm wafers.

    CategoryLithography
  14. PAS 5500 700ASML

    The ASML PAS 5500 / 700 is a Scanner and a Stepper.

    CategoryLithography
  15. Twinscan 1200 BASML

    The ASML Twinscan 1200 B is a lithography scanner equipped with a Cymer XLA 160 laser, but it is non-operational due to an internal water leak near the lens and has no lens data available.

    CategoryLithography
  16. PAS 5500 400 i-LineASML

    The ASML PAS 5500/400 is an i-line stepper for 8-inch wafers with a resolution of 280nm, introduced around 2002.

    CategoryLithography
  17. PAS 2500ASML

    The PAS 2500 series was the first lithography system developed entirely by ASML and became the system that built the company.

    CategoryLithography
  18. NXE 3400 B EUVASML

    The ASML TWINSCAN NXE:3400B is an extreme ultraviolet (EUV) lithography scanner designed for volume production at the 7 and 5 nm nodes.

    CategoryLithography
  19. PAS 5500 250 CASML
  20. Twinscan AT 850 DASML

    The ASML Twinscan AT 850 D is a semiconductor manufacturing tool offered with a Cymer ELS 7600 or ELS 6610 laser and a Tel Lithius track.

  21. PAS 2400ASML

    The PAS 2400 is an early photolithography system from ASML that was demonstrated in 1985 and achieved a throughput of 90 wafers per hour.

    CategoryLithography
  22. Twinscan XT 1950 HiASML

    ASML Twinscan XT 1950 Hi is a scanner for 12-inch wafers used for 193 nm immersion lithography with 38 nm resolution capacity.

    CategoryLithographyWafer300mm
  23. TWINSCAN EXE:5200BASML

    The TWINSCAN EXE:5200B is a dual-stage extreme ultraviolet (EUV) lithography system designed to support volume production of sub-2 nm Logic nodes and leading-edge DRAM nodes.

    CategoryLithographyNodesub-2 nm Logic, leading-edge DRAM
  24. TWINSCAN NXE:3800EASML

    The TWINSCAN NXE:3800E is a dual-stage EUV lithography system designed by ASML for high-volume manufacturing of advanced Logic and Memory chips.

    CategoryLithographyNode2 nm Logic nodes and leading-edge DRAM nodes
  25. TWINSCAN NXE:3600DASML

    The TWINSCAN NXE:3600D is an EUV lithography system for high-volume production of advanced Logic and DRAM chips.

    CategoryLithographyNode5 nm, 3 nm
  26. TWINSCAN NXE:3400CASML

    The TWINSCAN NXE:3400C is an EUV lithography system by ASML that supports volume production at the 7 and 5 nm logic nodes.

    CategoryLithographyNode7 nm, 5 nm
  27. TWINSCAN NXE:3100ASML

    The TWINSCAN NXE:3100 is a pre-production extreme ultraviolet (EUV) lithography system first shipped in 2010.

    CategoryLithography
    Pre-production
  28. TWINSCAN NXE:3300ASML

    The TWINSCAN NXE:3300 was the first EUV production system, shipped in 2013.

    CategoryLithography
  29. 4022.480.0062 Vacuum StageASML

    ASML model 4022.480.0062 is a Vacuum Stage described as an air vacuum puck in good working condition.

    CategoryLithography
  30. TWINSCAN EXE:5000ASML

    The ASML TWINSCAN EXE:5000 is a dual-stage extreme ultraviolet (EUV) lithography system that uses a 13.5 nm light source and a numerical aperture of 0.55 to achieve 8 nm resolution.

    CategoryLithography
  31. PAS 5500 22ASML

    The ASML PAS 5500/22 is a stepper used in semiconductor lithography.

    CategoryLithography
  32. 300 CASML

    The ASML 300 C is a model of equipment manufactured by ASML.

  33. PAS 5500 300 DUVASML

    The ASML PAS 5500/300 DUV is a deep ultraviolet (DUV) stepper.

    CategoryLithography
  34. XTF 400 FASML
  35. PAS 5500 100 CASML

    The ASML PAS 5500 / 100 C is a stepper system from 1995.

    CategoryLithography
  36. PAS 5500 300 CASML

    The ASML PAS 5500/300 C is a DUV stepper with a 248 nm exposure wavelength and 8 inch wafer support.

    CategoryLithographyWaferWafer Alignment:
  37. Twinscan XT 1250 DASML

    The ASML Twinscan XT 1250 D is a dry wafer scanner featuring a dual chuck wafer stage and a Cymer XLA165 light source.

    CategoryLithographyWaferContinuous clampable wafer table for dry WSs: Absent
  38. Twinscan NXT 1980 Di ImmersionASML
    CategoryLithography
  39. PAS 5500 200 i-LineASML

    The ASML PAS 5500/200 is an i-Line stepper for semiconductor lithography.

    CategoryLithography
  40. 4022.631.1584 Optical Gas AnalyzerASML

    ASML model 4022.631.1584 is an Optical Gas Analyzer.

    CategoryPrecision Optics
  41. PAS 5500 250 i-LineASML
    CategoryLithography
  42. Twinscan NXT 2050 i ImmersionASML

    The Twinscan NXT 2050 i is a high-productivity deep ultraviolet immersion lithography system for advanced logic and memory nodes.

    CategoryLithography
  43. Twinscan AT 1100ASML

    The ASML Twinscan AT 1100 is a 193 nm ArF laser-based lithography scanner that processes 200 mm and 300 mm wafers using dual-wafer stage technology.

    CategoryLithography
  44. YieldStar S 1375 F Overlay MeasurementASML

    The ASML YieldStar S 1375 F is an overlay measurement system for 12-inch wafers.

    CategoryMetrology & Inspection
  45. YieldStar S 100 B Overlay MeasurementASML

    The ASML YieldStar S 100 B is an overlay measurement system that processes 12-inch wafers.

    CategoryMetrology & Inspection
  46. Twinscan 1950 i ImmersionASML

    The ASML Twinscan 1950 i is an immersion scanner used in semiconductor lithography.

    CategoryLithography
  47. 5000 55 BASML

    The ASML 5000 / 55 B is a stepper that supports 6-inch wafers.

    CategoryLithography
  48. SERV.481.27891 ACC Controller AIASML
    CategoryWet Processing / Clean
  49. Twinscan XT 1400 FASML

    The ASML Twinscan XT 1400 F Scanner is a 193nm (ArF) lithography scanner stated to handle 12-inch wafers.

    CategoryLithography
  50. URS 5000 55 BASML

    The ASML URS 5000 / 55 B is a stepper that supports 6-inch wafers.

    CategoryLithography
  51. PAS 5500ASML

    The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.

    CategoryLithographyWafer200mmNode280 nm
    Legacy
  52. AT 850 BASML
  53. Yield Star S 250 Overlay MeasurementASML
    CategoryMetrology & Inspection
  54. ESC 400 RDAASML
  55. ESC 320 RDAASML

    The ASML ESC 320 RDA is a semiconductor manufacturing equipment item manufactured by ASML.

  56. PAS 5500 100ASML

    The PAS 5500/100 is a step-and-repeat i-line lithography system from ASML, introduced for 0.40 micron production.

    CategoryLithography
  57. 2500 40ASML

    The ASML 2500 / 40 is a stepper with a wafer table, reticle table, P-table, dipod, HP laser, and alignment laser.

    CategoryLithographyWaferWafer table
  58. YieldStar S 100 Overlay MeasurementASML

    The ASML YieldStar S 100 is an overlay measurement tool.

    CategoryMetrology & Inspection
  59. 4022.634.34071 PAAC 325/14 R PPCAASML

    The ASML 4022.634.34071 PAAC 325/14 R PPCA is a new, sealed Power Mod (SERV.634.34071) cleanroom product from 2018.

    CategoryWet Processing / Clean
  60. 5500 100ASML

    The PAS 5500/100 is a step-and-repeat i-line lithography system from ASML introduced for 0.40 micron production.

    CategoryLithography