Waferpedia

Tool family

SUSS MicroTec MA/BA6

SUSS MicroTecLithography1 entry

The SUSS MicroTec MA/BA6 is a contact aligner for broadband lithography with backside alignment capability.

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Models in this family

  1. MA/BA6

    The SUSS MicroTec MA/BA6 is a contact aligner for broadband lithography with backside alignment capability.

    Cited variants

    DesignationGenerationVintageChangesSource
    MA/BA6 Gen4———nist.gov[1]
    SUSS MicroTec MA/BA6 Gen4 Mask Aligner——Described with 1 µm feature size, 350 W mercury lamp, 6 in. diameter exposure area, 2 in. to 6 in. photomask support, and optional vacuum contact, hard contact, and soft contact modes.imseam.uni-heidelberg.de[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]nist.govnist.gov
  2. [2]imseam.uni-heidelberg.deimseam.uni-heidelberg.de